Title:
SLUG TUNER, MICROWAVE PLASMA SOURCE USING SAME, AND MICROWAVE PLASMA PROCESSING DEVICE
Document Type and Number:
WIPO Patent Application WO/2013/132911
Kind Code:
A1
Abstract:
A slug tuner (60) is equipped with: a microwave transmission path (44), at the tip end of which a planar antenna (81) is attached, and which has an outside conductor (52) and an inside conductor (53) that are coaxial; and slugs (61a, 61b) capable of moving along the inside conductor (53). The outside conductor (52) has a dual-tube construction comprising a first member (521) that forms an inner tube and a second member (522) that forms an outer tube, and when the inside conductor expands due to the heat of a plasma, a gap is formed between the tip of the first member (521) and the second member (522). The outside conductor (52) has a choke structure having a choke groove (525) that extends between the first member (521) and the second member (522) from the tip end to the base end of the outside conductor (52), with a length of λg/2, which places the base-end side base part of the choke groove (525) in the short-circuited state, and consequently the tip end of the outside conductor (52) is in the short-circuited state.
Inventors:
KASAI SHIGERU (JP)
IKEDA TARO (JP)
KOMATSU TOMOHITO (JP)
IKEDA TARO (JP)
KOMATSU TOMOHITO (JP)
Application Number:
PCT/JP2013/051532
Publication Date:
September 12, 2013
Filing Date:
January 25, 2013
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
H05H1/46; H01L21/3065; H01P5/02
Domestic Patent References:
| WO2007105411A1 | 2007-09-20 | |||
| WO2008153053A1 | 2008-12-18 | |||
| WO2012032942A1 | 2012-03-15 |
Foreign References:
| JP2010074154A | 2010-04-02 | |||
| JP2010003462A | 2010-01-07 |
Attorney, Agent or Firm:
TAKAYAMA HIROSHI (JP)
Hiroshi Takayama (JP)
Hiroshi Takayama (JP)
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