Title:
SLURRY FOR CHEMICAL MECHANICAL POLISHING AND POLISHING METHOD FOR SUBSTRATE USING SAME
Document Type and Number:
WIPO Patent Application WO/2011/058952
Kind Code:
A1
Abstract:
Disclosed is a slurry for chemical mechanical polishing, which contains (a) a water-soluble clathrate compound, (b) a polymer compound that comprises, as a side chain, an acidic group which may be in the form of a salt, (c) abrasive grains and (d) water. The slurry for chemical mechanical polishing is characterized in that: the content of the water-soluble clathrate compound (a) is 0.001-3% by mass (inclusive) of the total mass of the slurry; the polymer compound (b) has a weight average molecular weight of 1,000 or more but less than 1,000,000; and the content of the polymer compound (b) is 0.12-3% by mass (inclusive) of the total mass of the slurry. Also disclosed is a polishing method for a substrate, which uses the slurry for chemical mechanical polishing.
Inventors:
TAKEGOSHI, Minori (7471, Tamashimaotoshima, Kurashiki-sh, Okayama 50, 〒7138550, JP)
竹越 穣 (〒50 岡山県倉敷市玉島乙島７４７１番地 株式会社クラレ内 Okayama, 〒7138550, JP)
KATO, Mitsuru (7471, Tamashimaotoshima, Kurashiki-sh, Okayama 50, 〒7138550, JP)
加藤 充 (〒50 岡山県倉敷市玉島乙島７４７１番地 株式会社クラレ内 Okayama, 〒7138550, JP)
竹越 穣 (〒50 岡山県倉敷市玉島乙島７４７１番地 株式会社クラレ内 Okayama, 〒7138550, JP)
KATO, Mitsuru (7471, Tamashimaotoshima, Kurashiki-sh, Okayama 50, 〒7138550, JP)
加藤 充 (〒50 岡山県倉敷市玉島乙島７４７１番地 株式会社クラレ内 Okayama, 〒7138550, JP)
Application Number:
JP2010/069851
Publication Date:
May 19, 2011
Filing Date:
November 08, 2010
Export Citation:
Assignee:
KURARAY CO., LTD. (1621, Sakazu Kurashiki-sh, Okayama 01, 〒7100801, JP)
株式会社クラレ (〒01 岡山県倉敷市酒津１６２１番地 Okayama, 〒7100801, JP)
TAKEGOSHI, Minori (7471, Tamashimaotoshima, Kurashiki-sh, Okayama 50, 〒7138550, JP)
竹越 穣 (〒50 岡山県倉敷市玉島乙島７４７１番地 株式会社クラレ内 Okayama, 〒7138550, JP)
KATO, Mitsuru (7471, Tamashimaotoshima, Kurashiki-sh, Okayama 50, 〒7138550, JP)
株式会社クラレ (〒01 岡山県倉敷市酒津１６２１番地 Okayama, 〒7100801, JP)
TAKEGOSHI, Minori (7471, Tamashimaotoshima, Kurashiki-sh, Okayama 50, 〒7138550, JP)
竹越 穣 (〒50 岡山県倉敷市玉島乙島７４７１番地 株式会社クラレ内 Okayama, 〒7138550, JP)
KATO, Mitsuru (7471, Tamashimaotoshima, Kurashiki-sh, Okayama 50, 〒7138550, JP)
International Classes:
H01L21/304; B24B37/00; C09K3/14
Attorney, Agent or Firm:
TAKASHIMA, Hajime (Meiji Yasuda Seimei Osaka Midosuji Bldg, 1-1 Fushimimachi 4-chome, Chuo-ku, Osaka-sh, Osaka 44, 〒5410044, JP)
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