Title:
SLURRY, POLISHING FLUID SET, POLISHING FLUID, AND SUBSTRATE POLISHING METHOD USING SAME
Document Type and Number:
WIPO Patent Application WO/2011/111421
Kind Code:
A1
Abstract:
The disclosed slurry contains abrasive particles and water, said abrasive particles including tetravalent cerium hydroxide particles. An aqueous dispersion containing 1.0% of said abrasive particles by mass exhibits an optical transmittance of at least 50%/cm with respect to light having a wavelength of 500 nm. The disclosed polishing fluid contains abrasive particles, an additive, and water, said abrasive particles including tetravalent cerium hydroxide particles. An aqueous dispersion containing 1.0% of said abrasive particles by mass exhibits an optical transmittance of at least 50%/cm with respect to light having a wavelength of 500 nm.
Inventors:
IWANO Tomohiro (13-1, Higashi-cho 4-chome, Hitachi-sh, Ibaraki 55, 〒3178555, JP)
岩野 友洋 (〒55 茨城県日立市東町四丁目１３番１号 日立化成工業株式会社内 Ibaraki, 〒3178555, JP)
AKIMOTO Hirotaka (13-1, Higashi-cho 4-chome, Hitachi-sh, Ibaraki 55, 〒3178555, JP)
秋元 啓孝 (〒55 茨城県日立市東町四丁目１３番１号 日立化成工業株式会社内 Ibaraki, 〒3178555, JP)
NARITA Takenori (13-1, Higashi-cho 4-chome, Hitachi-sh, Ibaraki 55, 〒3178555, JP)
岩野 友洋 (〒55 茨城県日立市東町四丁目１３番１号 日立化成工業株式会社内 Ibaraki, 〒3178555, JP)
AKIMOTO Hirotaka (13-1, Higashi-cho 4-chome, Hitachi-sh, Ibaraki 55, 〒3178555, JP)
秋元 啓孝 (〒55 茨城県日立市東町四丁目１３番１号 日立化成工業株式会社内 Ibaraki, 〒3178555, JP)
NARITA Takenori (13-1, Higashi-cho 4-chome, Hitachi-sh, Ibaraki 55, 〒3178555, JP)
Application Number:
JP2011/050991
Publication Date:
September 15, 2011
Filing Date:
January 20, 2011
Export Citation:
Assignee:
HITACHI CHEMICAL COMPANY, LTD. (1-1 Nishi-Shinjuku 2-chome, Shinjuku-ku Tokyo, 49, 〒1630449, JP)
日立化成工業株式会社 (〒49 東京都新宿区西新宿二丁目１番１号 Tokyo, 〒1630449, JP)
IWANO Tomohiro (13-1, Higashi-cho 4-chome, Hitachi-sh, Ibaraki 55, 〒3178555, JP)
岩野 友洋 (〒55 茨城県日立市東町四丁目１３番１号 日立化成工業株式会社内 Ibaraki, 〒3178555, JP)
AKIMOTO Hirotaka (13-1, Higashi-cho 4-chome, Hitachi-sh, Ibaraki 55, 〒3178555, JP)
秋元 啓孝 (〒55 茨城県日立市東町四丁目１３番１号 日立化成工業株式会社内 Ibaraki, 〒3178555, JP)
日立化成工業株式会社 (〒49 東京都新宿区西新宿二丁目１番１号 Tokyo, 〒1630449, JP)
IWANO Tomohiro (13-1, Higashi-cho 4-chome, Hitachi-sh, Ibaraki 55, 〒3178555, JP)
岩野 友洋 (〒55 茨城県日立市東町四丁目１３番１号 日立化成工業株式会社内 Ibaraki, 〒3178555, JP)
AKIMOTO Hirotaka (13-1, Higashi-cho 4-chome, Hitachi-sh, Ibaraki 55, 〒3178555, JP)
秋元 啓孝 (〒55 茨城県日立市東町四丁目１３番１号 日立化成工業株式会社内 Ibaraki, 〒3178555, JP)
International Classes:
B24B37/00; C09K3/14; H01L21/304
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (SOEI PATENT AND LAW FIRM, Marunouchi MY PLAZA 9th fl.,1-1, Marunouchi 2-chom, Chiyoda-ku Tokyo 05, 〒1000005, JP)
Claims:
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