Title:
SLURRY REGENERATION APPARATUS, SLURRY REGENERATION METHOD, AND REGENERATED SLURRY
Document Type and Number:
WIPO Patent Application WO/2014/162708
Kind Code:
A1
Abstract:
A slurry regeneration apparatus for regenerating to reusable condition used slurry containing swarf generated when cutting an ingot using a wire saw, the apparatus being provided with: an air supply unit capable of supplying air to the used slurry; a centrifugal separation unit for centrifugally separating the used slurry to which air has been supplied by the air supply unit; a storage tank for storing the used slurry; and a stirring machine capable of stirring the used slurry stored in the storage tank. The air supply unit supplies air to the used slurry stored in the storage tank. The centrifugal separation unit conducts the used slurry stored in the storage tank out of the storage tank, and centrifugally separates the used slurry that has been conducted out.
Inventors:
INOUE KAZUMA (JP)
OGITA DAI (JP)
NOBUTO YOSHIKI (JP)
TAMAI MASAYUKI (JP)
MOTOOKA EIJI (JP)
OGITA DAI (JP)
NOBUTO YOSHIKI (JP)
TAMAI MASAYUKI (JP)
MOTOOKA EIJI (JP)
Application Number:
PCT/JP2014/001835
Publication Date:
October 09, 2014
Filing Date:
March 28, 2014
Export Citation:
Assignee:
KURARAY CO (JP)
International Classes:
B24B57/02; B23Q11/00; B28D5/04; H01L21/304
Domestic Patent References:
| WO2013035438A1 | 2013-03-14 | |||
| WO2008020507A1 | 2008-02-21 |
Foreign References:
| JP2011516290A | 2011-05-26 | |||
| JP2010001181A | 2010-01-07 | |||
| JPH09223679A | 1997-08-26 | |||
| JP2012514349A | 2012-06-21 | |||
| JP2011005561A | 2011-01-13 | |||
| JP2003506214A | 2003-02-18 | |||
| JP2011104693A | 2011-06-02 |
Attorney, Agent or Firm:
KOTANI, Etsuji et al. (JP)
Etsuji Kotani (JP)
Etsuji Kotani (JP)
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