Title:
SN-ZN-O OXIDE SINTERED BODY AND METHOD FOR PRODUCTION THEREOF
Document Type and Number:
WIPO Patent Application WO/2019/202909
Kind Code:
A1
Abstract:
[Problem] To provide a Sn-Zn-O oxide sintered body that resists reduction in conductivity during processing into a sputtering target, and a method for the production thereof. [Solution] An oxide sintered body is characterized by containing Sn in a proportion of 0.15-0.6 as the atomic ratio Sn/(Sn + Zn). The oxide sintered body is further characterized by, when a first addition element M is at least one selected from Ti, Ge, Bi, Ce, and Ga and a second addition element X is at least one selected from Nb, Ta, W, and Mo, containing the first addition element M in a proportion of 0.0001-0.04 as the atomic ratio with reference to the total amount of all metal elements M/(Sn + Zn + M + X), containing the second addition element X in a proportion of 0.0001-0.1 as the atomic ratio with reference to the total amount of all metal elements X/(Sn + Zn + M + X), and having an intragranular crack area ratio, as determined from an SEM image of a fracture surface of the sintered body, of at least 50%.
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Inventors:
ANDO ISAO (JP)
ARIIZUMI HIDEYUKI (JP)
SATO KEIICHI (JP)
ARIIZUMI HIDEYUKI (JP)
SATO KEIICHI (JP)
Application Number:
PCT/JP2019/012007
Publication Date:
October 24, 2019
Filing Date:
March 22, 2019
Export Citation:
Assignee:
SUMITOMO METAL MINING CO (JP)
International Classes:
C04B35/453; C23C14/34
Foreign References:
| JP2017145185A | 2017-08-24 | |||
| JP2018059185A | 2018-04-12 |
Attorney, Agent or Firm:
UEDA, Shozo et al. (JP)
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