Title:
SOFT X-RAY GENERATING DEVICE, AND DESTATICIZER
Document Type and Number:
WIPO Patent Application WO/2007/119715
Kind Code:
A1
Abstract:
Intended is to suppress a heat release thereby to elongate the lifetime of a device
for generating soft X-rays. In a destaticizer including an emitter as an electron
emitting portion and a target, a thin film made of diamond particles having a particle
size of 2 nm to 100 nm is formed on the surface of the emitter. This thin film has
an XRD pattern of diamond in an XRD measurement, and has a ratio of 2.5 to 2.7 : 1 between
an sp3-bonding component and an sp2-bonding component in the film when subjected
to the Raman spectroscopy. When a DC voltage is applied to the emitter, at a threshold
field intensity of 1 V/μm, more electrons than those of the prior art are
emitted from the emitter, but the temperature of the emitter hardly rises, so
that the lifetime can be elongated.
Inventors:
INABA HITOSHI (JP)
OKUBO YOSHINORI (JP)
YAGI YOSHIYUKI (JP)
SATO SHUNICHI (JP)
NISHIMURA KAZUHITO (JP)
OKUBO YOSHINORI (JP)
YAGI YOSHIYUKI (JP)
SATO SHUNICHI (JP)
NISHIMURA KAZUHITO (JP)
Application Number:
PCT/JP2007/057890
Publication Date:
October 25, 2007
Filing Date:
April 10, 2007
Export Citation:
Assignee:
TAKASAGO THERMAL ENGINEERING (JP)
CASIO COMPUTER CO LTD (JP)
KOCHI IND PROMOTION CT (JP)
INABA HITOSHI (JP)
OKUBO YOSHINORI (JP)
YAGI YOSHIYUKI (JP)
SATO SHUNICHI (JP)
NISHIMURA KAZUHITO (JP)
CASIO COMPUTER CO LTD (JP)
KOCHI IND PROMOTION CT (JP)
INABA HITOSHI (JP)
OKUBO YOSHINORI (JP)
YAGI YOSHIYUKI (JP)
SATO SHUNICHI (JP)
NISHIMURA KAZUHITO (JP)
International Classes:
H05G1/00; G21K1/00; G21K5/00; G21K5/02; H01J35/06; H01J35/08; H05F3/06
Foreign References:
JP2004144647A | 2004-05-20 | |||
JP2001035427A | 2001-02-09 | |||
JPH02267844A | 1990-11-01 | |||
JP2006179457A | 2006-07-06 | |||
JP2006125881A | 2006-05-18 |
Other References:
"Kochi-Ken Chiiki Kesshugata Kyodo Kenkyu Jigyo Jisedai Joho Device yo Usumaku Nano Gijutsu no Kaihatsu", ZAIDAN HOJIN KOCHI-KEN SANGYO SHINKO CENTER, February 2006 (2006-02-01), pages 6 - 14, XP003018548
Attorney, Agent or Firm:
KANEMOTO, Tetsuo (Shinjuku Akebonobashi Building 1-1, Sumiyoshi-cho Shinjuku-ku Tokyo 65, JP)
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