SOFT X-RAY LIGHT SOURCE

WIPO Patent Application WO/2020/134500

A1

A soft X-ray light source, comprising a vacuum target chamber, a refrigeration cavity (44) and a nozzle (36). The refrigeration cavity (44) and the nozzle (36) are accommodated in the vacuum target chamber. The nozzle (36) is provided on the refrigeration cavity (44). The vacuum target chamber comprises a three-way pipe (40) and a multi-way pipe (50). The three-way pipe (40) has a first outlet, a second outlet and a third outlet that are opposite to one another, the first outlet being connected to a supporting plate (10); and a refrigerant inlet pipeline (13), a refrigerant outlet pipeline (12) and a working gas pipeline (11) respectively pass through the supporting plate (10) and are connected to the refrigeration cavity (44), the third outlet being connected to an evacuating device. The multi-way pipe (50) comprises a top opening and a bottom opening opposite to each other, the top opening being closely connected to the second outlet, and a vacuum outlet being provided at the bottom opening. The position of the nozzle (36) corresponds to a side opening, and a groove is provided below the nozzle (36), the groove being fixed by means of a metal adapter (513), the metal adapter (513) being provided at the vacuum outlet, and the groove being in communication with the vacuum outlet. The refrigeration cavity (44) maintains high refrigeration performance, such that the stability of a micro-liquid flow is maintained, improving the performance of soft X-rays.

JP5758153	Radiation source equipment, lithography equipment, radiation generation and transmission methods, and device manufacturing methods
WO/2015/082004	AMPLIFIER ARRANGEMENT AND DRIVER LASER ARRANGEMENT FOR AN EUV LIGHT SOURCE COMPRISING SAME
JP5758569	Slab type laser device

LIU WEI (CN)
ZHENG RUI (CN)
XIE QINGGUO (CN)
XIAO PENG (CN)

PCT/CN2019/113890

July 02, 2020

October 29, 2019

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RAYCAN TECHNOLOGY CO LTD SUZHOU (CN)

H05G2/00

CN109640500A	2019-04-16
CN109696447A	2019-04-30
CN209659697U	2019-11-19
CN209659696U	2019-11-19
CN1728915A	2006-02-01
US20070053487A1	2007-03-08
CN103234481A	2013-08-07
CN101111119A	2008-01-23

See also references of EP 3905857A4

CHINA FARFIR INTELLECTUAL PROPERTY (CN)

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