Title:
SOFT X-RAY LIGHT SOURCE
Document Type and Number:
WIPO Patent Application WO/2020/134501
Kind Code:
A1
Abstract:
A soft X-ray light source, comprising a vacuum target chamber, a refrigeration chamber (44), and a nozzle (36). The refrigeration chamber (44) and the nozzle (36) are accommodated in the vacuum target chamber; the nozzle (36) is provided on the refrigeration chamber (44). The soft X-ray light source further comprises a supporting plate (10), a corrugated pipe (60), and a three-dimensional displacement mechanism; the supporting plate (10) is provided on the vacuum target chamber; a refrigerant inlet pipeline (13), a refrigerant outlet pipeline (12), and a working gas pipeline (11) which penetrates through the supporting plate (10) are provided on the supporting plate (10); the refrigerant inlet pipeline (13) and the refrigerant outlet pipeline (12) are communicated with the refrigeration chamber (44); the working gas pipeline (11) penetrates through the refrigeration chamber (44) and is connected to the nozzle (36); the corrugated pipe (60) is provided between the supporting plate (10) and the vacuum target chamber; the refrigerant inlet pipeline (13), the refrigerant outlet pipeline (12), and the working gas pipeline (11) all penetrate through the corrugated pipe (60). The three-dimensional displacement mechanism is provided between the supporting plate (10) and the vacuum target chamber. The position of the nozzle (36) can be adjusted in an X-axis direction, a Y-axis direction, and a Z-axis direction.
Inventors:
LIU WEI (CN)
ZHENG RUI (CN)
XIE QINGGUO (CN)
XIAO PENG (CN)
ZHENG RUI (CN)
XIE QINGGUO (CN)
XIAO PENG (CN)
Application Number:
PCT/CN2019/113892
Publication Date:
July 02, 2020
Filing Date:
October 29, 2019
Export Citation:
Assignee:
RAYCAN TECHNOLOGY CO LTD SUZHOU (CN)
International Classes:
H05G2/00
Foreign References:
| CN109640500A | 2019-04-16 | |||
| CN109696447A | 2019-04-30 | |||
| CN209659697U | 2019-11-19 | |||
| CN209659696U | 2019-11-19 | |||
| CN1728915A | 2006-02-01 | |||
| CN103234481A | 2013-08-07 | |||
| CN101111119A | 2008-01-23 | |||
| US20110051897A1 | 2011-03-03 |
Attorney, Agent or Firm:
CHINA FARFIR INTELLECTUAL PROPERTY (CN)
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