Title:
SOFT X-RAY MICRO IMAGING DEVICE
Document Type and Number:
WIPO Patent Application WO/2020/134503
Kind Code:
A1
Abstract:
A soft X-ray micro imaging device, which comprises a soft X-ray light source (300), a three-dimensional displacement mechanism, a vacuum unit (400), a laser unit (500), a reflection unit (600), a sample chamber (700) and a detector (800), wherein the soft X-ray light source (300) comprises a vacuum target chamber, a refrigeration chamber (44) and a nozzle (36), wherein the refrigeration chamber (44) and the nozzle (36) are accommodated in the vacuum target chamber, the nozzle (36) is arranged on the refrigeration chamber (44), the three-dimensional displacement mechanism is respectively connected with the refrigeration chamber (44) and the vacuum target chamber, and the vacuum target chamber is provided with two opposite outlets; the vacuum unit (400) comprises a first vacuum pump (420) and a second vacuum pump (430), which are respectively connected with the two outlets of the vacuum target chamber; the pulse laser emitted by a pulse laser generator (501) is focused at the nozzle (36) after passing through a laser focusing mirror (520); the reflection unit (600) is provided with a second reflector (605); the sample chamber (700) communicates with the vacuum target chamber, a capillary glass tube (713) is accommodated in the sample chamber (700), and the position of the capillary glass tube (713) corresponds to the nozzle (36) and the focal point of the second reflector (605); and the detector (800) is connected with the sample chamber (700) and corresponds to the position of the capillary glass tube (713). Therefore, the soft X-ray micro imaging device has advantages of precise detection, high efficiency and economical cost.
Inventors:
ZHENG RUI (CN)
LIU WEI (CN)
XIE QINGGUO (CN)
XIAO PENG (CN)
LIU WEI (CN)
XIE QINGGUO (CN)
XIAO PENG (CN)
Application Number:
PCT/CN2019/113900
Publication Date:
July 02, 2020
Filing Date:
October 29, 2019
Export Citation:
Assignee:
RAYCAN TECHNOLOGY CO LTD SUZHOU (CN)
International Classes:
H05G2/00
Foreign References:
| CN109696447A | 2019-04-30 | |||
| CN209656591U | 2019-11-19 | |||
| US20070053487A1 | 2007-03-08 | |||
| CN103234481A | 2013-08-07 | |||
| CN1728915A | 2006-02-01 |
Attorney, Agent or Firm:
CHINA FARFIR INTELLECTUAL PROPERTY (CN)
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