Title:
SOFT X-RAY SHIELDING SHEET USED IN SOFT X-RAY ELECTROSTATIC REMOVAL DEVICE AND ITS MANUFACTURING METHOD
Document Type and Number:
WIPO Patent Application WO/2008/023727
Kind Code:
A1
Abstract:
A soft X-ray shielding sheet (1) includes: a first external layer sheet (2) having
a supply opening (5) for supplying ionized air (11); an intermediate layer sheet
(3) having an ionized air flow-in opening (6) communicating with the supply opening;
and a second external layer sheet (4) having a discharge opening (8) communicating
with the ionized air passage (6). The sheets (2, 3, 4) are overlaid on one another
and boded. One or more ionized air passages 9 are provided to communicate with
the supply opening (5), the ionized air passage (6), and the discharge opening
(8).
Inventors:
KISAKIBARU TOSHIROU (JP)
Application Number:
PCT/JP2007/066260
Publication Date:
February 28, 2008
Filing Date:
August 22, 2007
Export Citation:
Assignee:
KONDOH IND LTD (JP)
CAMBRIDGE FILTER JAPAN LTD (JP)
KISAKIBARU TOSHIROU (JP)
CAMBRIDGE FILTER JAPAN LTD (JP)
KISAKIBARU TOSHIROU (JP)
International Classes:
H05F3/06; H01L21/02
Foreign References:
| JP2005339921A | 2005-12-08 | |||
| JP2005019044A | 2005-01-20 | |||
| JP2001257096A | 2001-09-21 |
Other References:
See also references of EP 2056653A4
Attorney, Agent or Firm:
YAMASAKI, Yukuzo et al. (Sogo Nagatacho Bldg. 8F 11-2, Nagatacho 1-chome Chiyoda-ku Tokyo 14, JP)
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