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Title:
SOFT X-RAY SOURCE, EXPOSURE APPARATUS, AND MICROSCOPE
Document Type and Number:
WIPO Patent Application WO/2018/034020
Kind Code:
A1
Abstract:
This soft X-ray source is provided with: a laser device 36 which generates a plasma containing an element included in a target 32 by irradiating the target with a laser beam 60, and causes soft X-rays 62 to radiate from the plasma; and a chamber 30 which houses the target in the interior thereof and which, when the laser device irradiates the target with the laser beam, adjusts the gas pressure of a gas in the interior to a pressure not lower than 10 Pa but lower than the atmospheric pressure.

Inventors:
EJIMA, Takeo (2-1-1 Katahira, Aoba-k, Sendai-shi Miyagi 77, 〒9808577, JP)
KADO, Masataka (NATIONAL INSTITUTES FOR QUANTUM AND RADIOLOGICAL SCIENCE AND TECHNOLOGY 8-1-7, Umemida, Kizugawa-shi Kyoto 15, 〒6190215, JP)
SHINOHARA, Kunio (NATIONAL INSTITUTES FOR QUANTUM AND RADIOLOGICAL SCIENCE AND TECHNOLOGY 8-1-7, Umemida, Kizugawa-shi Kyoto 15, 〒6190215, JP)
KISHIMOTO, Maki (NATIONAL INSTITUTES FOR QUANTUM AND RADIOLOGICAL SCIENCE AND TECHNOLOGY 8-1-7, Umemida, Kizugawa-shi Kyoto 15, 〒6190215, JP)
Application Number:
JP2017/012554
Publication Date:
February 22, 2018
Filing Date:
March 28, 2017
Export Citation:
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Assignee:
TOHOKU UNIVERSITY (2-1-1, Katahira Aoba-k, Sendai-shi Miyagi 77, 〒9808577, JP)
International Classes:
G03F7/20; G21K5/02; G21K7/00; H05G2/00; H05H1/24
Domestic Patent References:
WO2015124372A22015-08-27
Foreign References:
JP2015505418A2015-02-19
JP2012199582A2012-10-18
JP2005317611A2005-11-10
Attorney, Agent or Firm:
KATAYAMA, Shuhei (Mitsui Sumitomo Marine Tepco Building, 6-1 Kyobashi 1-chome, Chuo-k, Tokyo 31, 〒1040031, JP)
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