Title:
SOLAR BATTERY ELEMENT MANUFACTURING METHOD, SOLAR BATTERY ELEMENT, AND SOLAR BATTERY MODULE
Document Type and Number:
WIPO Patent Application WO/2012/102368
Kind Code:
A1
Abstract:
The purpose of the present invention is to provide a method for manufacturing a solar battery element having good output characteristics. For accomplishing the purpose, when a solar battery element is manufactured, a first main surface of a first conductive type semiconductor substrate is etched using an acid aqueous solution so as to form an uneven part on the first main surface of the semiconductor substrate. In addition, a second conductive type semiconductor layer having a conductive type opposite to that of the first conductive type is formed in a region of the first main surface of the semiconductor substrate. In the process of forming the uneven part, a first etching treatment is performed on the first main surface of the semiconductor substrate by using a first acid aqueous solution containing hydrofluoric acid, nitric acid, and sulfuric acid, and then a second etching treatment is performed on the first main surface of the semiconductor substrate by using a second acid aqueous solution containing hydrofluoric acid and nitric acid but substantially not containing sulfuric acid.
Inventors:
KOMODA Manabu (Shiga Yasu Plant 800, Ichimiyake, Yasu-sh, Shiga 62, 〒5202362, JP)
古茂田 学 (〒62 滋賀県野洲市市三宅８００ 京セラ株式会社滋賀野洲工場内 Shiga, 〒5202362, JP)
OKADA Yasuhiro (Shiga Yasu Plant 800, Ichimiyake, Yasu-sh, Shiga 62, 〒5202362, JP)
岡田 靖寛 (〒62 滋賀県野洲市市三宅８００ 京セラ株式会社滋賀野洲工場内 Shiga, 〒5202362, JP)
NAGOU Yuusuke (Shiga Yohkaichi Plant 1166-6, Hebimizo-cho, Higashiomi-sh, Shiga 55, 〒5278555, JP)
古茂田 学 (〒62 滋賀県野洲市市三宅８００ 京セラ株式会社滋賀野洲工場内 Shiga, 〒5202362, JP)
OKADA Yasuhiro (Shiga Yasu Plant 800, Ichimiyake, Yasu-sh, Shiga 62, 〒5202362, JP)
岡田 靖寛 (〒62 滋賀県野洲市市三宅８００ 京セラ株式会社滋賀野洲工場内 Shiga, 〒5202362, JP)
NAGOU Yuusuke (Shiga Yohkaichi Plant 1166-6, Hebimizo-cho, Higashiomi-sh, Shiga 55, 〒5278555, JP)
Application Number:
JP2012/051757
Publication Date:
August 02, 2012
Filing Date:
January 27, 2012
Export Citation:
Assignee:
KYOCERA Corporation (6 Takeda Tobadono-cho, Fushimi-ku Kyoto-sh, Kyoto 01, 〒6128501, JP)
京セラ株式会社 (〒01 京都府京都市伏見区竹田鳥羽殿町６ Kyoto, 〒6128501, JP)
KOMODA Manabu (Shiga Yasu Plant 800, Ichimiyake, Yasu-sh, Shiga 62, 〒5202362, JP)
古茂田 学 (〒62 滋賀県野洲市市三宅８００ 京セラ株式会社滋賀野洲工場内 Shiga, 〒5202362, JP)
OKADA Yasuhiro (Shiga Yasu Plant 800, Ichimiyake, Yasu-sh, Shiga 62, 〒5202362, JP)
岡田 靖寛 (〒62 滋賀県野洲市市三宅８００ 京セラ株式会社滋賀野洲工場内 Shiga, 〒5202362, JP)
京セラ株式会社 (〒01 京都府京都市伏見区竹田鳥羽殿町６ Kyoto, 〒6128501, JP)
KOMODA Manabu (Shiga Yasu Plant 800, Ichimiyake, Yasu-sh, Shiga 62, 〒5202362, JP)
古茂田 学 (〒62 滋賀県野洲市市三宅８００ 京セラ株式会社滋賀野洲工場内 Shiga, 〒5202362, JP)
OKADA Yasuhiro (Shiga Yasu Plant 800, Ichimiyake, Yasu-sh, Shiga 62, 〒5202362, JP)
岡田 靖寛 (〒62 滋賀県野洲市市三宅８００ 京セラ株式会社滋賀野洲工場内 Shiga, 〒5202362, JP)
International Classes:
H01L31/04; H01L21/306
Attorney, Agent or Firm:
YOSHITAKE Hidetoshi et al. (10th floor, Sumitomo-seimei OBP Plaza Bldg.4-70, Shiromi 1-chome,Chuo-ku, Osaka-shi, Osaka 01, 〒5400001, JP)
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