Title:
SOLAR CELL MANUFACTURING METHOD AND SOLAR CELL
Document Type and Number:
WIPO Patent Application WO/2015/151288
Kind Code:
A1
Abstract:
The purpose of the present invention is to achieve high efficiency by reducing surface concentration of a light receiving surface and increasing impurity concentration under electrodes, while facilitating concentration control of a diffusion layer. At the time of forming a high concentration diffusion layer (5) on a part of a first surface (1A) of a substrate (1) having formed thereon a diffusion layer (2) of a light receiving surface, an impurity in the outermost surface of the diffusion layer (2) of the light receiving surface is taken into a thermally oxidized film (6) by performing thermal oxidation in a state wherein a diffusion source is formed. Consequently, an impurity concentration of the outermost surface of the diffusion layer (2) of the light receiving surface is set lower than the impurity concentration of the inner side.
Inventors:
KOHATA HAYATO (JP)
Application Number:
PCT/JP2014/060012
Publication Date:
October 08, 2015
Filing Date:
April 04, 2014
Export Citation:
Assignee:
MITSUBISHI ELECTRIC CORP (JP)
International Classes:
H01L31/068
Domestic Patent References:
| WO2013022076A1 | 2013-02-14 |
Foreign References:
| JP2012049424A | 2012-03-08 | |||
| JP2010186900A | 2010-08-26 |
Attorney, Agent or Firm:
SAKAI, HIROAKI (JP)
Hiroaki Sakai (JP)
Hiroaki Sakai (JP)
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