Title:
SOLID ELECTROLYTIC SWITCHING ELEMENT, METHOD FOR MANUFACTURING SUCH SOLID ELECTROLYTIC SWITCHING ELEMENT AND INTEGRATED CIRCUIT
Document Type and Number:
WIPO Patent Application WO/2006/075731
Kind Code:
A1
Abstract:
A switching element is provided with a first electrode (14) and a second electrode (15) arranged at a prescribed interval; a solid electrolytic layer (16) brought into contact with the first electrode (14) and the second electrode (15); a third electrode (18) which is brought into contact with the solid electrolytic layer (16) and can supply a metal ion; and a metal diffusion preventing film (17) for covering a portion on the surface of the solid electrolytic layer (16) not covering any of the first electrode (14), the second electrode (15) and the third electrode (18). Thus, metal ion is prevented from affecting other elements.
Inventors:
SUNAMURA HIROSHI (JP)
INOUE NAOYA (JP)
SAKAMOTO TOSHITSUGU (JP)
KAWAURA HISAO (JP)
INOUE NAOYA (JP)
SAKAMOTO TOSHITSUGU (JP)
KAWAURA HISAO (JP)
Application Number:
PCT/JP2006/300420
Publication Date:
July 20, 2006
Filing Date:
January 16, 2006
Export Citation:
Assignee:
NEC CORP (JP)
SUNAMURA HIROSHI (JP)
INOUE NAOYA (JP)
SAKAMOTO TOSHITSUGU (JP)
KAWAURA HISAO (JP)
SUNAMURA HIROSHI (JP)
INOUE NAOYA (JP)
SAKAMOTO TOSHITSUGU (JP)
KAWAURA HISAO (JP)
International Classes:
H01L49/02; H01L21/82; H01L27/10; H01L29/12; H01L29/80
Domestic Patent References:
| WO2003094227A1 | 2003-11-13 |
Foreign References:
| JP2000512058A | 2000-09-12 | |||
| JP2003092387A | 2003-03-28 | |||
| JP2001525606A | 2001-12-11 | |||
| JP2002536840A | 2002-10-29 |
Other References:
SAKAMOTO T. ET AL.: "A nonvolatile programmable solid electrolyte nanometer switch", SOLID-STATE CIRCUITS CONFERENCE, 2004. DIGEST OF TECHNICAL PAPERS. ISSCC. 2004 IEEE INTERNATIONAL, 15 February 2004 (2004-02-15), pages 290 - 299, XP010722267
SAKAMOTO T. ET AL.: "Nanometer-scale switches copper sulfide", APPLIED PHYSICS LETTERS, vol. 82, no. 18, 5 May 2003 (2003-05-05), pages 3032 - 3034, XP001170600
SAKAMOTO T. ET AL.: "Nanometer-scale switches copper sulfide", APPLIED PHYSICS LETTERS, vol. 82, no. 18, 5 May 2003 (2003-05-05), pages 3032 - 3034, XP001170600
Attorney, Agent or Firm:
Miyazaki, Teruo (16th Kowa Bldg. 9-20, Aksasaka 1-chome, Minato-k, Tokyo 52, JP)
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