Title:
SOLID IMMERSION LENS UNIT AND SEMICONDUCTOR DETECTOR DEVICE
Document Type and Number:
WIPO Patent Application WO/2018/110221
Kind Code:
A1
Abstract:
A solid immersion lens unit comprises: a solid immersion lens comprising a contact surface that is brought into contact with an object to be detected, and a spherical surface that is disposed facing an objective lens; a holder for holding the solid immersion lens; a magnet provided on the holder; and a spherical body rotatably held by the magnetic force of the magnet at a position facing the spherical surface. The holder holds the solid immersion lens in a manner allowing rocking, with the spherical surface in contact with the spherical body.
Inventors:
NAKAMURA TOMONORI (JP)
NAKAMURA AKIHIRO (JP)
NAKAMURA AKIHIRO (JP)
Application Number:
PCT/JP2017/041852
Publication Date:
June 21, 2018
Filing Date:
November 21, 2017
Export Citation:
Assignee:
HAMAMATSU PHOTONICS KK (JP)
International Classes:
G02B7/02; G02B21/00; G02B21/02; H01L21/66
Domestic Patent References:
| WO2016047667A1 | 2016-03-31 | |||
| WO2016047666A1 | 2016-03-31 |
Foreign References:
| JP2010281960A | 2010-12-16 | |||
| JP2013105115A | 2013-05-30 | |||
| JP2011164007A | 2011-08-25 | |||
| JP2006228289A | 2006-08-31 | |||
| US20150260976A1 | 2015-09-17 |
Other References:
See also references of EP 3557297A4
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
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