Title:
SOLID-STATE IMAGING DEVICE, METHOD FOR PRODUCING SOLID-STATE IMAGING DEVICE, AND ELECTRONIC INSTRUMENT
Document Type and Number:
WIPO Patent Application WO/2022/239464
Kind Code:
A1
Abstract:
The purpose of the present invention is to provide a solid-state imaging device, a method for producing a solid-state imaging device, and an electronic instrument in which it is possible to relieve tensile stress produced between a coating film and a semiconductor element that is coated with the coating film and that is joined to a solid-state imaging element, and in which a transistor can be disposed near a chip end. The present invention is configured to have a solid-state imaging element; a semiconductor element that is laminated on the solid-state imaging element and electrically connected thereto; and a coating film that coats a peripheral side surface of the semiconductor element and a non-laminated portion, which is a region where the semiconductor element is not laminated, of a laminated surface of the solid-state imaging element where the semiconductor element is laminated, the coating film forming an air gap with respect to the peripheral side surface of the semiconductor element. This makes it possible to relieve tensile stress produced in the chip end of the semiconductor element when the non-laminated portion of the solid-state imaging element and the entire surface of the semiconductor element located on the opposite side from the laminated surface including the peripheral side surface are coated with an oxide film or another coating film.
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Inventors:
HIRATSUKA TATSUMASA (JP)
Application Number:
PCT/JP2022/011774
Publication Date:
November 17, 2022
Filing Date:
March 16, 2022
Export Citation:
Assignee:
SONY SEMICONDUCTOR SOLUTIONS CORP (JP)
International Classes:
H01L21/768; H01L23/522; H01L23/532; H01L27/146
Domestic Patent References:
| WO2011108156A1 | 2011-09-09 |
Foreign References:
| JP2013520808A | 2013-06-06 | |||
| JP2005101332A | 2005-04-14 | |||
| JP2001085655A | 2001-03-30 | |||
| JP2009010352A | 2009-01-15 | |||
| JP2012159395A | 2012-08-23 | |||
| US20030054583A1 | 2003-03-20 |
Attorney, Agent or Firm:
MATSUO Kenichiro (JP)
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