Title:
SOLIDLY MOUNTED RESONATOR AND MANUFACTURING METHOD THEREOF
Document Type and Number:
WIPO Patent Application WO/2021/184252
Kind Code:
A1
Abstract:
Provided are a solidly mounted resonator and a manufacturing method thereof The solidly mounted resonator comprises a piezoelectric structure. The piezoelectric structure comprises an upper electrode layer, a lower electrode layer and a piezoelectric layer. The lower electrode layer is arranged under the piezoelectric structure. The lower electrode layer comprises a protrusion protruding downwardly from a lower surface of the lower electrode layer. The piezoelectric layer is provided at an upper surface of the lower electrode layer. The upper electrode layer is provided at an upper surface of the piezoelectric layer. The protrusion is formed at the lower surface of the lower electrode layer, such that the upper surface of the lower electrode layer that contacts the piezoelectric layer is flat. Since the piezoelectric layer is grown on a flat surface, it is easier to obtain a crystal structure having improved grain and high C-axis orientation, thereby improving piezoelectric performance of the piezoelectric layer, and enhancing performance (e.g., an increase in the Q value) of the resonator.
Inventors:
WANG WEI (CN)
YANG JINMING (CN)
LI PING (CN)
JIANG JIANG (CN)
PENG BOHUA (CN)
HU NIANCHU (CN)
JIA BIN (CN)
YANG JINMING (CN)
LI PING (CN)
JIANG JIANG (CN)
PENG BOHUA (CN)
HU NIANCHU (CN)
JIA BIN (CN)
Application Number:
PCT/CN2020/079973
Publication Date:
September 23, 2021
Filing Date:
March 18, 2020
Export Citation:
Assignee:
EPICMEMS XIAMEN CO LTD (CN)
International Classes:
H03H3/02; H03H9/17
Foreign References:
| CN111294011A | 2020-06-16 | |||
| CN1638271A | 2005-07-13 | |||
| CN1845453A | 2006-10-11 | |||
| CN105099391A | 2015-11-25 |
Attorney, Agent or Firm:
CHINA SCIENCE PATENT & TRADEMARK AGENT LTD. (CN)
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