Title:
SOLUTION BASED NON-VACUUM METHOD AND APPARATUS FOR PREPARING OXIDE MATERIALS
Document Type and Number:
WIPO Patent Application WO/2010/093781
Kind Code:
A3
Abstract:
A high quality, highly adherent layer of a metal and oxygen material such as a transparent electrically conductive oxide material is electro deposited onto a substrate in a solution deposition process. The substrate is activated prior to the electro deposition of the metal and oxygen material thereonto by contacting it with a multidentate activating agent which promotes the adhesion of the metal and oxygen material to the substrate. Use of the activation agent eliminates the need to pre-deposit a "seed" layer of the metal and oxygen material onto the substrate by a vacuum deposition process. Process parameters are controlled so as to result in the deposition of a high quality layer of material which is suitable for use in a back reflector structure of a high efficiency photovoltaic device In particular instances the activation method may be implemented in a continuous, roll-to-roll process. Further disclosed are semiconductor devices and components of semiconductor devices made by the present process, as well as apparatus for carrying out the process.
Inventors:
LIU SHENGZHONG (US)
HU CHAOLAN (US)
ZHOU YANHUA (US)
YOUNAN KAIS (US)
DOTTER BUD (US)
CANNELLA VINCENT (US)
BANERJEE ARINDAM (US)
YANG JEFFREY (US)
GUHA SUBHENDU (US)
HU CHAOLAN (US)
ZHOU YANHUA (US)
YOUNAN KAIS (US)
DOTTER BUD (US)
CANNELLA VINCENT (US)
BANERJEE ARINDAM (US)
YANG JEFFREY (US)
GUHA SUBHENDU (US)
Application Number:
PCT/US2010/023878
Publication Date:
November 18, 2010
Filing Date:
February 11, 2010
Export Citation:
Assignee:
UNITED SOLAR OVONIC LLC (US)
LIU SHENGZHONG (US)
HU CHAOLAN (US)
ZHOU YANHUA (US)
YOUNAN KAIS (US)
DOTTER BUD (US)
CANNELLA VINCENT (US)
BANERJEE ARINDAM (US)
YANG JEFFREY (US)
GUHA SUBHENDU (US)
LIU SHENGZHONG (US)
HU CHAOLAN (US)
ZHOU YANHUA (US)
YOUNAN KAIS (US)
DOTTER BUD (US)
CANNELLA VINCENT (US)
BANERJEE ARINDAM (US)
YANG JEFFREY (US)
GUHA SUBHENDU (US)
International Classes:
H01L31/18; H01L21/288
Foreign References:
| US6544877B1 | 2003-04-08 | |||
| JPH10229212A | 1998-08-25 | |||
| US6068755A | 2000-05-30 | |||
| JP2005206937A | 2005-08-04 |
Attorney, Agent or Firm:
CITKOWSKI, Ronald, W. et al. (Krass Sprinkle, Anderson & Citkowski, PC,2701 Troy Center Drive, Suite 330,Post Office Box 702, Troy MI, US)
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