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Title:
SOLUTION TANK DEVICE
Document Type and Number:
WIPO Patent Application WO/2017/138149
Kind Code:
A1
Abstract:
A solution tank device has an insulating thin film that allows an object of measurement to pass therethrough and has a thickness of 1 μm or less, a first solution tank that supports one of the two surfaces of the thin film, and a first conductive structure that is provided at a location where contact friction occurs between the first solution tank and an external object and has a sheet resistance of 1013 Ω or less.

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Inventors:
MATSUI KAZUMA (JP)
YANAGI ITARU (JP)
Application Number:
PCT/JP2016/054141
Publication Date:
August 17, 2017
Filing Date:
February 12, 2016
Export Citation:
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Assignee:
HITACHI LTD (JP)
International Classes:
G01N27/00
Foreign References:
JP2015037409A2015-02-26
JP2005098790A2005-04-14
JP2005291846A2005-10-20
JP2008039584A2008-02-21
JP2015222261A2015-12-10
Attorney, Agent or Firm:
TOU-OU PATENT FIRM (JP)
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