Title:
SOLUTION TO THERMAL BUDGET
Document Type and Number:
WIPO Patent Application WO2005010949
Kind Code:
A3
Abstract:
A method of fabricating on optical detector 32, the method including providing a substrate 12 that includes an optical waveguide 30 formed therein and having a surface for fabricating microelectronic circuitry 40 thereon; fabricating microelectronic circuitry on the substrate 12, the fabricating involving a plurality of sequential process phases; after a selected one of the plurality of sequential process phases has occurred and before the next process phase after the selected one of the plurality of process phases begins, fabricating an optical detector within the optical waveguide; and after fabricating the optical detector in the waveguide, completing the plurality of sequential process phases for fabricating the microelectronic circuitry.
More Like This:
Inventors:
WADA YUICHI (JP)
LEON FRANCISCO A (US)
LEON FRANCISCO A (US)
Application Number:
PCT/US2004/023624
Publication Date:
February 16, 2006
Filing Date:
July 22, 2004
Export Citation:
Assignee:
APPLIED MATERIALS INC (US)
WADA YUICHI (JP)
LEON FRANCISCO A (US)
WADA YUICHI (JP)
LEON FRANCISCO A (US)
International Classes:
C30B29/12; C30B33/00; G02B6/12; G02B6/42; G02B6/43; H01L21/00; H01L21/3205; H01L21/4763; H01L21/84; H01L27/12; H01L31/0352; (IPC1-7): G02B6/12
Foreign References:
| US20040003338A1 | 2004-01-01 |
Other References:
See also references of EP 1658519A4
Download PDF:
Previous Patent: CLEANING PROCESS AND APPARATUS FOR SILICATE MATERIALS
Next Patent: ULTRASONIC ASSISTED ETCH USING CORROSIVE LIQUIDS
Next Patent: ULTRASONIC ASSISTED ETCH USING CORROSIVE LIQUIDS