Title:
SOURCE ARRANGEMENT, DEPOSITION APPARATUS AND METHOD FOR DEPOSITING SOURCE MATERIAL
Document Type and Number:
WIPO Patent Application WO/2020/212398
Kind Code:
A3
Abstract:
The invention relates to a source arrangement for a deposition apparatus with a direct surface heater for applying a heating power onto a source surface of a source element, comprising a holding structure with a support and at least one source element arranged at the support, the source element comprising a source surface and a second surface opposite to the source surface, wherein the source material can be vaporized and/or sublimated from a source area on the source surface when heated by the surface heater of the deposition apparatus. Further, the invention is related to a deposition apparatus comprising such a source arrangement and to a method for depositing source material on a target material in the deposition apparatus, whereby the deposition apparatus comprises a surface heater and such a source arrangement.
Inventors:
BRAUN WOLFGANG (DE)
Application Number:
PCT/EP2020/060550
Publication Date:
November 26, 2020
Filing Date:
April 15, 2020
Export Citation:
Assignee:
MAX PLANCK GESELLSCHAFT (DE)
International Classes:
C23C14/28; C23C14/54
Foreign References:
| US4112137A | 1978-09-05 | |||
| JP2013079437A | 2013-05-02 | |||
| US5905753A | 1999-05-18 |
Attorney, Agent or Firm:
MANITZ FINSTERWALD (DE)
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