Title:
SOURCE OF A COLLIMATED ELECTRONIC BEAM WITH COLD CATHODE
Document Type and Number:
WIPO Patent Application WO/2010/139740
Kind Code:
A3
Abstract:
The invention relates in general terms to the field of "cold cathode" electronic cathodes including an electrically conductive flat substrate (2) and an emitter comprising a tip (1) with a micrometric or nanometric diameter arranged vertically above the surface of the substrate. The cathode according to the invention comprises a single annular electrode (6) electrically insulated from the substrate by an insulating layer (3) and centred on the emitter, the source comprising a means for applying a potential difference of several dozen volts between the substrate and the annular electrode, enough to cause the emission of an electronic beam from the tip of the emitter, the annular electrode being large enough to focus said electronic beam. A source of an electronic beam can comprise a plurality of identical cathodes arranged in a specific pattern.
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Inventors:
ROBERT CEDRIC (FR)
LEGAGNEUX PIERRE (FR)
PONARD PASCAL (FR)
ANDRE FREDERIC (DE)
COJOCARU COSTEL SORIN (FR)
SCHNELL JEAN-PHILIPPE (FR)
LEGAGNEUX PIERRE (FR)
PONARD PASCAL (FR)
ANDRE FREDERIC (DE)
COJOCARU COSTEL SORIN (FR)
SCHNELL JEAN-PHILIPPE (FR)
Application Number:
PCT/EP2010/057734
Publication Date:
January 27, 2011
Filing Date:
June 02, 2010
Export Citation:
Assignee:
THALES SA (FR)
ECOLE POLYTECH (FR)
ROBERT CEDRIC (FR)
LEGAGNEUX PIERRE (FR)
PONARD PASCAL (FR)
ANDRE FREDERIC (DE)
COJOCARU COSTEL SORIN (FR)
SCHNELL JEAN-PHILIPPE (FR)
ECOLE POLYTECH (FR)
ROBERT CEDRIC (FR)
LEGAGNEUX PIERRE (FR)
PONARD PASCAL (FR)
ANDRE FREDERIC (DE)
COJOCARU COSTEL SORIN (FR)
SCHNELL JEAN-PHILIPPE (FR)
International Classes:
H01J1/304
Foreign References:
| US20050133779A1 | 2005-06-23 | |||
| US20050040752A1 | 2005-02-24 | |||
| EP1329929A1 | 2003-07-23 | |||
| US20050258729A1 | 2005-11-24 | |||
| EP1737012A2 | 2006-12-27 | |||
| US5773921A | 1998-06-30 | |||
| EP1758147A2 | 2007-02-28 | |||
| EP1780759A2 | 2007-05-02 | |||
| EP0038865A1 | 1981-11-04 |
Other References:
TEO K B K ET AL: "Fabrication and electrical characteristics of carbon nanotube-based microcathodes for use in a parallel electron-beam lithography system", JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B: MICROELECTRONICSPROCESSING AND PHENOMENA, AMERICAN VACUUM SOCIETY, NEW YORK, NY, US, vol. 21, no. 2, 1 March 2003 (2003-03-01), pages 693 - 697, XP012009827, ISSN: 0734-211X
TSENG S C ET AL: "Field emission characteristics of a single free standing carbon nanotube with gate electrode", DIAMOND AND RELATED MATERIALS, ELSEVIER SCIENCE PUBLISHERS, AMSTERDAM, NL, vol. 14, no. 11-12, 1 November 2005 (2005-11-01), pages 2064 - 2068, XP025331693, ISSN: 0925-9635, [retrieved on 20051101]
TSENG S C ET AL: "Field emission characteristics of a single free standing carbon nanotube with gate electrode", DIAMOND AND RELATED MATERIALS, ELSEVIER SCIENCE PUBLISHERS, AMSTERDAM, NL, vol. 14, no. 11-12, 1 November 2005 (2005-11-01), pages 2064 - 2068, XP025331693, ISSN: 0925-9635, [retrieved on 20051101]
Attorney, Agent or Firm:
BREDA, Jean-Marc et al. (Conseils en Propriété IndustrielleImmeuble VISIU, 22 avenue Aristide Briand Arcueil Cedex, FR)
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