Title:
SPACE TRANSFORMER AND PROBE CARD
Document Type and Number:
WIPO Patent Application WO/2013/108759
Kind Code:
A1
Abstract:
Provided are: a space transformer that has a coefficient of thermal expansion close to silicon, and that has a simple structure and is suitable for large diameters; and a probe card equipped with said space transformer. Enstatite and boron nitride are included as constituents, and through-holes, which pass through in the thickness direction of a sinter in which the boron nitride is oriented in one direction, are formed. A ceramic substrate obtained by filling the through-holes with a conductive material is provided. The two main surfaces of the ceramic substrate are each provided with a wiring pattern that includes a plurality of electrodes. The spacing of the electrodes in the wiring of one main surface differs to the spacing of the electrodes in the wiring pattern of the other main surface.
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Inventors:
ENDO NAOKI (JP)
KANEDA NORIYOSHI (JP)
MIYAJI SHINYA (JP)
KANEDA NORIYOSHI (JP)
MIYAJI SHINYA (JP)
Application Number:
PCT/JP2013/050593
Publication Date:
July 25, 2013
Filing Date:
January 15, 2013
Export Citation:
Assignee:
NHK SPRING CO LTD (JP)
International Classes:
G01R1/073; G01R31/26; H01L21/66
Domestic Patent References:
| WO2007142204A1 | 2007-12-13 |
Foreign References:
| JP2010275149A | 2010-12-09 | |||
| JP2004336062A | 2004-11-25 | |||
| JP2002050869A | 2002-02-15 | |||
| JP2008024530A | 2008-02-07 | |||
| JP2012020901A | 2012-02-02 |
Attorney, Agent or Firm:
SAKAI, HIROAKI (JP)
Hiroaki Sakai (JP)
Hiroaki Sakai (JP)
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Claims: