Title:
SPATIAL-LIGHT-MODULATING OPTICAL SYSTEM, ILLUMINATION OPTICAL SYSTEM, EXPOSURE DEVICE, AND METHOD FOR PRODUCING DEVICE
Document Type and Number:
WIPO Patent Application WO/2014/073548
Kind Code:
A1
Abstract:
This illumination optical system can achieve a desired pupil intensity distribution by suppressing the effect of unneeded light not from a mirror element of a spatial light modulator. The present invention is provided with: a spatial light modulator having a plurality of mirror elements that are arrayed in a predetermined plane and are controlled individually; and a distribution formation optical system that causes light that has traversed the spatial light modulator to be distributed at a predetermined light strength distribution at the illumination pupil of the illumination optical system. The direction of any given pair of opposing edges of two adjacent mirror elements of the plurality of mirror elements of the spatial light modulator, and the direction of the line of intersection between a predetermined plane and a plane perpendicular to the predetermined plane containing the axis line of an entering light beam entering to the spatial light modulator intersect at a required angle that is not 0°.
Inventors:
MIZUNO YASUSHI (JP)
Application Number:
PCT/JP2013/079955
Publication Date:
May 15, 2014
Filing Date:
November 06, 2013
Export Citation:
Assignee:
NIKON CORP (JP)
International Classes:
G02B26/08
Domestic Patent References:
| WO2009125511A1 | 2009-10-15 |
Foreign References:
| JPH09230257A | 1997-09-05 | |||
| JP2011521445A | 2011-07-21 | |||
| JP2011170299A | 2011-09-01 | |||
| JP2008058965A | 2008-03-13 |
Attorney, Agent or Firm:
YAMAGUCHI TAKAO (JP)
Takao Yamaguchi (JP)
Takao Yamaguchi (JP)
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