Title:
SPATIAL LIGHT MODULATOR FOR ACTUATING MEMS STRUCTURES
Document Type and Number:
WIPO Patent Application WO/2014/043234
Kind Code:
A3
Abstract:
A spatial light modulator is provided by positioning and repositioning micromirrors of a microelectromechanical system. The micromirrors are positioned by an actuator linked to the micromirrors by a frame. The actuator responds to a control signal having voltages that create electrical fields. The electrical fields provide forces that change the positions of the micromirrors in such a way that a light beam striking the micromirrors reflects as a modulated light beam.
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Inventors:
HESTER C ANTHONY (US)
HESTER CHARLES F (US)
HESTER CHARLES F (US)
Application Number:
PCT/US2013/059263
Publication Date:
July 16, 2015
Filing Date:
September 11, 2013
Export Citation:
Assignee:
HESTER C ANTHONY (US)
HESTER CHARLES F (US)
HESTER CHARLES F (US)
International Classes:
G02B26/02; G02B26/06; G02F1/29
Foreign References:
| US6661637B2 | 2003-12-09 | |||
| US20040036950A1 | 2004-02-26 |
Other References:
KIM, S ET AL.: "MEMS for Optical Functionality.", J. ELECTROCERAMICS., vol. 12, no. ISSUE, 2004, pages 133 - 144, Retrieved from the Internet
Attorney, Agent or Firm:
HOLLAND, Jon, E. et al. (655 Gallatin Street S, Huntsville AL, US)
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