Title:
SPATIAL LIGHT MODULATOR
Document Type and Number:
WIPO Patent Application WO2001037033
Kind Code:
A3
Abstract:
A modulator formed with a solid state electro-optic material having a pixellated structure interconnected to a circuit on a semiconductor substrate. Silicon CMOS integrated circuit that can include random access memories (RAMs) are used as a substrate and interfaced to solid state electro-optic materials coated thereon. In particular, the electro-optic modulators are controlled by RAM cells to produce a modulation of reflected light. SRAMs can be used with connection to the SRAM cell flip-flop. DRAMs can be used with the modulator replacing the DRAM storage capacitor. The SLM thus formed can be connected to a digital computer and controlled as if were a being written to as a memory, but other IC structures can also be used. In order to enhance the modulation effects, the electro-optic material is used as the spacer for a Fabry-Perot etalon structure that is also deposited on the semiconductor substrate. PLZT is a suitable electro-optic material.
Inventors:
WANG FEILING (US)
LI KEWEN KEVIN (US)
TSANG DEAN (US)
LI KEWEN KEVIN (US)
TSANG DEAN (US)
Application Number:
PCT/US2000/031762
Publication Date:
January 17, 2002
Filing Date:
November 17, 2000
Export Citation:
Assignee:
CORNING APPLIED TECHNOLOGIES (US)
WANG FEILING (US)
LI KEWEN KEVIN (US)
TSANG DEAN (US)
WANG FEILING (US)
LI KEWEN KEVIN (US)
TSANG DEAN (US)
International Classes:
G02F1/03; G02F1/055; G02F1/21; (IPC1-7): G02F1/055; G02F1/03
Foreign References:
| GB1172852A | 1969-12-03 | |||
| GB2261522A | 1993-05-19 | |||
| EP0380326A2 | 1990-08-01 |
Other References:
PATENT ABSTRACTS OF JAPAN vol. 016, no. 174 (E - 1195) 27 April 1992 (1992-04-27)
WANG F ET AL: "LARGE ELECTROOPTIC MODULATION USING FERROELECTRIC THIN FILMS IN A FABRY-PEROT CAVITY", PROCEEDINGS OF THE IEEE INTERNATIONAL SYMPOSIUM ON APPLICATIONS OF FERROELECTRICS (ISAF),US,NEW YORK, IEEE, vol. SYMP. 9, 7 August 1994 (1994-08-07), pages 683 - 686, XP000553188, ISBN: 0-7803-1858-7
TSEN-HWANG LIN ET AL: "TWO-DIMENSIONAL SPATIAL LIGHT MODULATORS FABRICATED IN SI/PLZT", APPLIED OPTICS,US,OPTICAL SOCIETY OF AMERICA,WASHINGTON, vol. 29, no. 11, 10 April 1990 (1990-04-10), pages 1595 - 1603, XP000113946, ISSN: 0003-6935
LI K K ET AL: "An automatic dip coating process for dielectric thin and thick films", INTEGRATED FERROELECTRICS, 1993, UK, vol. 3, no. 1, pages 81 - 91, XP001004608, ISSN: 1058-4587
WANG F ET AL: "LARGE ELECTROOPTIC MODULATION USING FERROELECTRIC THIN FILMS IN A FABRY-PEROT CAVITY", PROCEEDINGS OF THE IEEE INTERNATIONAL SYMPOSIUM ON APPLICATIONS OF FERROELECTRICS (ISAF),US,NEW YORK, IEEE, vol. SYMP. 9, 7 August 1994 (1994-08-07), pages 683 - 686, XP000553188, ISBN: 0-7803-1858-7
TSEN-HWANG LIN ET AL: "TWO-DIMENSIONAL SPATIAL LIGHT MODULATORS FABRICATED IN SI/PLZT", APPLIED OPTICS,US,OPTICAL SOCIETY OF AMERICA,WASHINGTON, vol. 29, no. 11, 10 April 1990 (1990-04-10), pages 1595 - 1603, XP000113946, ISSN: 0003-6935
LI K K ET AL: "An automatic dip coating process for dielectric thin and thick films", INTEGRATED FERROELECTRICS, 1993, UK, vol. 3, no. 1, pages 81 - 91, XP001004608, ISSN: 1058-4587
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