Title:
SPECIFIC-RESISTANCE ADJUSTING METHOD FOR ULTRAPURE WATER AND ULTRAPURE-WATER TREATMENT DEVICE
Document Type and Number:
WIPO Patent Application WO/2011/086727
Kind Code:
A1
Abstract:
Disclosed is a specific-resistance adjusting method for ultrapure water used for adjusting the specific resistance value of ultrapure water by dissolving carbon dioxide in the ultrapure water, which comprises supplying carbon dioxide to a motor-driven rotary valve while adjusting the pressure of the carbon dioxide; supplying the carbon dioxide to a gas-liquid contact chamber in accordance with the number of revolutions of the motor-driven rotary valve; measuring the specific resistance value of ultrapure water discharged from the gas-liquid contact chamber; adjusting the number of revolutions of the motor-driven rotary valve by feeding the measured specific resistance value back; and keeping the specific resistance value of the ultrapure water after the carbon dioxide is dissolved in the range of 0.2 to 1.0 MΩ·cm. Also disclosed is an ultrapure-water treatment device that is preferable to the specific-resistance adjusting method.
Inventors:
HARADA, Saburo (2-5 Minami-shinagawa 2-chome, Shinagawa-k, Tokyo 04, 〒1400004, JP)
原田 三郎 (〒04 東京都品川区南品川二丁目２番５号 株式会社トライテック内 Tokyo, 〒1400004, JP)
YUNOKI, Toru (2-5 Minami-shinagawa 2-chome, Shinagawa-k, Tokyo 04, 〒1400004, JP)
柚木 徹 (〒04 東京都品川区南品川二丁目２番５号 株式会社トライテック内 Tokyo, 〒1400004, JP)
原田 三郎 (〒04 東京都品川区南品川二丁目２番５号 株式会社トライテック内 Tokyo, 〒1400004, JP)
YUNOKI, Toru (2-5 Minami-shinagawa 2-chome, Shinagawa-k, Tokyo 04, 〒1400004, JP)
柚木 徹 (〒04 東京都品川区南品川二丁目２番５号 株式会社トライテック内 Tokyo, 〒1400004, JP)
Application Number:
JP2010/065472
Publication Date:
July 21, 2011
Filing Date:
September 09, 2010
Export Citation:
Assignee:
IWATANI CORPORATION (6-4 Hommachi 3-chome, Chuo-ku Osaka-sh, Osaka 53, 〒5410053, JP)
岩谷産業株式会社 (〒53 大阪府大阪市中央区本町３丁目６番４号 Osaka, 〒5410053, JP)
HARADA, Saburo (2-5 Minami-shinagawa 2-chome, Shinagawa-k, Tokyo 04, 〒1400004, JP)
原田 三郎 (〒04 東京都品川区南品川二丁目２番５号 株式会社トライテック内 Tokyo, 〒1400004, JP)
YUNOKI, Toru (2-5 Minami-shinagawa 2-chome, Shinagawa-k, Tokyo 04, 〒1400004, JP)
岩谷産業株式会社 (〒53 大阪府大阪市中央区本町３丁目６番４号 Osaka, 〒5410053, JP)
HARADA, Saburo (2-5 Minami-shinagawa 2-chome, Shinagawa-k, Tokyo 04, 〒1400004, JP)
原田 三郎 (〒04 東京都品川区南品川二丁目２番５号 株式会社トライテック内 Tokyo, 〒1400004, JP)
YUNOKI, Toru (2-5 Minami-shinagawa 2-chome, Shinagawa-k, Tokyo 04, 〒1400004, JP)
International Classes:
C02F1/00; B01F1/00
Attorney, Agent or Firm:
OHTANI, Tamotsu et al. (OHTANI PATENT OFFICE, Bridgestone Toranomon Bldg. 6F. 25-2, Toranomon 3-chome, Minato-k, Tokyo 01, 〒1050001, JP)
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