Title:
SPECIFIED GAS CONCENTRATION SENSOR
Document Type and Number:
WIPO Patent Application WO/2012/033147
Kind Code:
A1
Abstract:
Provided is a compact specified gas concentration sensor which utilizes temperature increase based on a thermal reaction when a specified gas such as a hydrogen gas or an oxygen gas in an atmospheric gas is absorbed, operates at a low temperature, and has mass productivity, thereby enabling lower cost, higher gas selectivity, and higher-precision and wider-range concentration measurement.
A specified gas concentration sensor in which a thin film thermally separated from a substrate is provided with a heater, a temperature sensor, and a specified gas-absorbing material, and temperature change accompanying heat generation when a specified gas in an atmospheric gas is absorbed can be measured by the temperature sensor, wherein after the specified gas is released from the specified gas-absorbing material by heating by the heater and the heating by the heater is stopped, the concentration of the specified gas in the atmospheric gas is found using the output of the temperature sensor at a point in time after a period of time longer than or equal to the thermal time constant of the thin film when the specified gas in the heater is not present. Moreover, the thin film is further provided with a heat conduction type sensor that does not have the specified gas-absorbing material if needed, thereby widening the measurement range of the concentration of the specified gas.
Inventors:
KIMURA MITSUTERU (JP)
Application Number:
PCT/JP2011/070427
Publication Date:
March 15, 2012
Filing Date:
September 08, 2011
Export Citation:
Assignee:
TOHOKU GAKUIN (JP)
KIMURA MITSUTERU (JP)
KIMURA MITSUTERU (JP)
International Classes:
G01N25/32; G01N25/20
Foreign References:
| JP2008111822A | 2008-05-15 | |||
| JP2009128254A | 2009-06-11 | |||
| JPH0534307A | 1993-02-09 |
Other References:
NORIAKI TAKASHIMA ET AL.: "Palladium no Suiso Kyuzo ni yoru Hatsunetsu o Riyo shita Suiso Gas Sensor no Teian", HEISEI 22 NEN NATIONAL CONVENTION RECORD I.E.E., 5 March 2010 (2010-03-05), JAPAN, pages 231
YASUHIRO ABE ET AL.: "Development of a MEMS Gas Flow Sensor Unified with an Impurity-Gas Concentration Sensor", THE TRANSACTIONS OF THE INSTITUTE OF ELECTRICAL ENGINEERS OF JAPAN E, vol. 130, no. 8, 1 August 2010 (2010-08-01), pages 412 - 416
YASUHIRO ABE ET AL.: "Development of a MEMS Gas Flow Sensor Unified with an Impurity-Gas Concentration Sensor", THE TRANSACTIONS OF THE INSTITUTE OF ELECTRICAL ENGINEERS OF JAPAN E, vol. 130, no. 8, 1 August 2010 (2010-08-01), pages 412 - 416
Attorney, Agent or Firm:
FUKUMORI, Hisao (JP)
Hisao Fukumori (JP)
Hisao Fukumori (JP)
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