Title:
SPECIMEN INSPECTION APPARATUS AND SPECIMEN INSPECTION METHOD
Document Type and Number:
WIPO Patent Application WO/2020/071716
Kind Code:
A1
Abstract:
According to an embodiment of a specimen inspection apparatus, the specimen inspection apparatus may comprise: a radiation unit; a reflection unit; a focus adjusting unit; a reception unit; and a control unit. The specimen inspection apparatus may comprise: a radiation unit for emitting a terahertz wave; a reflection unit for changing the path of a terahertz wave emitted from the radiation unit; a focus adjusting unit for forming an irradiation region on a specimen according to the path of the terahertz wave; a reception unit for receiving individual terahertz waves obtained by reflection, by the specimen, of the terahertz wave irradiated onto the first region; and a control unit for controlling the distance between at least two elements among the plurality of elements, and detecting whether the specimen is defective, according to the reflectivity difference between the terahertz waves.
Inventors:
KIM HAK SUNG (KR)
OH GYUNG HWAN (KR)
PARK DONG WOON (KR)
OH GYUNG HWAN (KR)
PARK DONG WOON (KR)
Application Number:
PCT/KR2019/012782
Publication Date:
April 09, 2020
Filing Date:
October 01, 2019
Export Citation:
Assignee:
UNIV HANYANG IND UNIV COOP FOUND (KR)
International Classes:
G01N21/3581; C03C17/23
Foreign References:
| JP2014002024A | 2014-01-09 | |||
| KR20150137097A | 2015-12-08 | |||
| KR20130077221A | 2013-07-09 | |||
| JP2013228329A | 2013-11-07 | |||
| US20140183365A1 | 2014-07-03 |
Attorney, Agent or Firm:
IPS PATENT FIRM (KR)
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