Title:
SPECIMEN OBSERVATION METHOD
Document Type and Number:
WIPO Patent Application WO/2017/158806
Kind Code:
A1
Abstract:
Charged particle beam apparatuses such as scanning electron microscopes and transmission electron microscopes are known as specimen observation apparatuses. After extensive investigation, the inventors of the present invention identified the problem that a contrast level sufficient for enabling an operator to identify microbubbles is not achieved in a charged particle beam image of a liquid subjected to a bubble-generating treatment. The inventors discovered a phenomenon in which a contrast level sufficient for enabling an operator to identify microbubbles is achieved in a charged particle beam image of a specimen including a liquid and an ionic liquid subjected to a bubble-generating treatment. One of the features of the present invention is the use of this phenomenon. According to the present invention, bubbles in a liquid, for example, microbubbles, can be observed.
Inventors:
NAKANO KIYOTAKA (JP)
NAKAZAWA EIKO (JP)
NAKAZAWA EIKO (JP)
Application Number:
PCT/JP2016/058622
Publication Date:
September 21, 2017
Filing Date:
March 18, 2016
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
G01N23/04; G01N1/28; G01N23/225; H01J37/20
Foreign References:
| JP2016095183A | 2016-05-26 | |||
| JP2009266741A | 2009-11-12 | |||
| JP3165429U | 2011-01-20 | |||
| US20120120226A1 | 2012-05-17 |
Other References:
TAKANORI NAKAYAMA ET AL: "Observation of ionic 1-13 liquid interface in a nanotube", THE JAPAN SOCIETY OF MECHANICAL ENGINEERS KYUSHU BRANCH KOEN RONBUNSHU, vol. 118, no. 1, 17 March 2011 (2011-03-17), pages 261 - 262
Attorney, Agent or Firm:
TODA Yuji (JP)
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