Title:
SPECIMEN SHAPE MEASUREMENT METHOD AND SPECIMEN SHAPE MEASUREMENT DEVICE
Document Type and Number:
WIPO Patent Application WO/2016/185729
Kind Code:
A1
Abstract:
This specimen shape measurement method involves a step S10 for preparing an illumination light which passes through a prescribed illumination region, a step S20 for irradiating a specimen with the illumination light, and a prescribed treatment step S30. The prescribed illumination region is configured such that the optical axis is not contained in the pupil position of an illumination optical system, and is configured such that, in the pupil position of the observation optical system, the illumination light is illuminated onto a portion inside of the pupil and to outside of the pupil. The illumination light passes through the specimen, and the light emitted from the specimen is incident into the observation optical system. The prescribed treatment step S30 includes a step S31 for receiving light emitted from the observation optical system, a step S32 for calculating the intensity of the received light, a step S33 for calculating the difference between, or the ratio of, the light intensity and a reference light intensity, and a step S34 for calculating the inclination amount of the specimen surface from the difference or ratio.
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Inventors:
SUZUKI YOSHIMASA (JP)
ODE HISASHI (JP)
ODAIRA MAYUMI (JP)
ODE HISASHI (JP)
ODAIRA MAYUMI (JP)
Application Number:
PCT/JP2016/050453
Publication Date:
November 24, 2016
Filing Date:
January 08, 2016
Export Citation:
Assignee:
OLYMPUS CORP (JP)
International Classes:
G01B11/24; G01B11/26
Foreign References:
| JP2009168582A | 2009-07-30 | |||
| JP2004163129A | 2004-06-10 | |||
| JP2004109348A | 2004-04-08 | |||
| JP2005208027A | 2005-08-04 | |||
| JP2009008643A | 2009-01-15 |
Attorney, Agent or Firm:
SAITO Keisuke et al. (JP)
斎藤圭介 (JP)
斎藤圭介 (JP)
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