Title:
SPECIMEN TESTING DEVICE AND METHOD FOR CREATING ABSORBED CURRENT IMAGE
Document Type and Number:
WIPO Patent Application WO/2012/014736
Kind Code:
A1
Abstract:
The present invention provides a technique whereby changes in absorbed current obtained from a defect location present in a wiring segment to be tested is emphasized relative to those for other wiring segments. The following scheme is adopted for a specimen-testing device in which an absorbed current image is output for the absorbed current outputted by two probes during scanning of an electron beam: when the electron beam encounters a defect location in a wiring segment on a specimen electrically connected by the two probes, the change in resistance thereof is greater than when the electron beam encounters a normal wiring segment. This change in resistance is detected as a change in the ratio between a known resistance and the resistance of the wiring segment identified by the two probes. With this system, an absorbed current image corresponding to the defect location can be readily distinguished from absorbed current images of other wiring segments.
Inventors:
OBUKI Tomoharu (HITACHI HIGH-TECHNOLOGIES CORPORATION 882, Oaza Ichige, Hitachinaka-sh, Ibaraki 04, 〒3128504, JP)
尾吹友晴 (〒04 茨城県ひたちなか市大字市毛８８２番地 株式会社日立ハイテクノロジーズ 那珂事業所内 Ibaraki, 〒3128504, JP)
NAKAMURA Mitsuhiro (HITACHI HIGH-TECHNOLOGIES CORPORATION 882, Oaza Ichige, Hitachinaka-sh, Ibaraki 04, 〒3128504, JP)
中村光宏 (〒04 茨城県ひたちなか市大字市毛８８２番地 株式会社日立ハイテクノロジーズ 那珂事業所内 Ibaraki, 〒3128504, JP)
尾吹友晴 (〒04 茨城県ひたちなか市大字市毛８８２番地 株式会社日立ハイテクノロジーズ 那珂事業所内 Ibaraki, 〒3128504, JP)
NAKAMURA Mitsuhiro (HITACHI HIGH-TECHNOLOGIES CORPORATION 882, Oaza Ichige, Hitachinaka-sh, Ibaraki 04, 〒3128504, JP)
中村光宏 (〒04 茨城県ひたちなか市大字市毛８８２番地 株式会社日立ハイテクノロジーズ 那珂事業所内 Ibaraki, 〒3128504, JP)
Application Number:
JP2011/066400
Publication Date:
February 02, 2012
Filing Date:
July 20, 2011
Export Citation:
Assignee:
HITACHI HIGH-TECHNOLOGIES CORPORATION (24-14, Nishi Shimbashi 1-chome Minato-k, Tokyo 17, 〒1058717, JP)
株式会社日立ハイテクノロジーズ (〒17 東京都港区西新橋一丁目２４番１４号 Tokyo, 〒1058717, JP)
OBUKI Tomoharu (HITACHI HIGH-TECHNOLOGIES CORPORATION 882, Oaza Ichige, Hitachinaka-sh, Ibaraki 04, 〒3128504, JP)
尾吹友晴 (〒04 茨城県ひたちなか市大字市毛８８２番地 株式会社日立ハイテクノロジーズ 那珂事業所内 Ibaraki, 〒3128504, JP)
NAKAMURA Mitsuhiro (HITACHI HIGH-TECHNOLOGIES CORPORATION 882, Oaza Ichige, Hitachinaka-sh, Ibaraki 04, 〒3128504, JP)
株式会社日立ハイテクノロジーズ (〒17 東京都港区西新橋一丁目２４番１４号 Tokyo, 〒1058717, JP)
OBUKI Tomoharu (HITACHI HIGH-TECHNOLOGIES CORPORATION 882, Oaza Ichige, Hitachinaka-sh, Ibaraki 04, 〒3128504, JP)
尾吹友晴 (〒04 茨城県ひたちなか市大字市毛８８２番地 株式会社日立ハイテクノロジーズ 那珂事業所内 Ibaraki, 〒3128504, JP)
NAKAMURA Mitsuhiro (HITACHI HIGH-TECHNOLOGIES CORPORATION 882, Oaza Ichige, Hitachinaka-sh, Ibaraki 04, 〒3128504, JP)
International Classes:
H01L21/66; G01R31/302
Attorney, Agent or Firm:
HIRAKI Yusuke et al. (Kamiya-cho MT Bldg. 19F, 3-20 Toranomon 4-chome, Minato-k, Tokyo 01, 〒1050001, JP)
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Claims: