SPECTRAL SENSOR - HAMAMATSU PHOTONICS KK

Title:

SPECTRAL SENSOR

Document Type and Number:

WIPO Patent Application WO/2013/172230

Kind Code:

A1

Abstract:

A spectral sensor (1A) is provided with an interference filter section (20A), a light detection board (30A) and a separator (15). The interference filter section (20A) comprises a cavity layer (21) and first and second mirror layers (22, 23) facing each other through the cavity layer (21), and in accordance with an input position, selectively lets light of a specified wavelength range penetrate from the first mirror layer (22) side to the second mirror layer (23) side. The light detection board: (30A) comprises a light receiving surface (32a) to which the light that has penetrated the interference filter section (20A) is input; and detects the light input to the light receiving surface (32a). The separator (15) extends from the cavity layer (21) to the first and/or second mirror layer (22, 23), and optically separates the interference filter section (20A) when viewed from a specified direction that intersects the light receiving surface (32a).

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Inventors:

SHIBAYAMA KATSUMI (JP)
KASAHARA TAKASHI (JP)

Application Number:

PCT/JP2013/062915

Publication Date:

November 21, 2013

Filing Date:

May 08, 2013

Export Citation:

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Assignee:

HAMAMATSU PHOTONICS KK (JP)

International Classes:

G01J3/26; G01J3/36

Foreign References:

US5784507A	1998-07-21
JPS5339784A	1978-04-11
JPS58195127A	1983-11-14
JPS6435325A	1989-02-06

Attorney, Agent or Firm:

HASEGAWA Yoshiki et al. (JP)
Yoshiki Hasegawa (JP)

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