SPECTRAL SENSOR

WIPO Patent Application WO/2015/177974

A1

　A spectral separation part (3) includes a MEMS mirror (30) for holding a diffraction grating (35). A first photodetector (5) receives a specific order of diffracted light from the diffraction grating (35). A second photoreceptor (7) is capable of receiving zero-order diffracted light from the diffraction grating (35). A signal processing device (10) obtains the deflection angle of a movable part (23) on the basis of the detection timing of the zero-order diffracted light and the oscillation frequency of a movable part (32), and performs one-to-one correlation of a wavelength stored in advance corresponding to the deflection angle and a signal of the first photoreceptor (5) obtained at the deflection angle. The MEMS mirror (30) is provided with a support part (31), the movable part (32) on an inside of the support part (31), a pair of torsion spring parts (33) on either side of the movable part (32) and connecting the support part (31) and the movable part (32), and a mirror part (34) formed on a surface side of the movable part (32). A drive part (4) is provided integrally with the MEMS mirror (30), and drives the movable part (32).

WO/1999/046628	OPTICAL DEMULTIPLEXER AND METHOD OF ASSEMBLING THE SAME
JPS60100631	[Title of the device] Diverging ray selection detecting device
JP7309874	Compact diffraction-limited near-infrared (NIR) spectrometer and associated detectors

YOSHIHARA TAKAAKI

PCT/JP2015/002303

November 26, 2015

May 01, 2015

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PANASONIC IP MAN CO LTD (JP)

G01J3/18; G01J3/36

JP2004325928A	2004-11-18
JP2004037282A	2004-02-05
JPS5770415A	1982-04-30
JP2013522600A	2013-06-13
JP2004069516A	2004-03-04
US20120069421A1	2012-03-22

NISHIKAWA, Yoshikiyo et al. (JP)
Yoshikiyo Nishikawa (JP)

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