Title:
SPECTROMETER AND MICROSPECTROSCOPY SYSTEM
Document Type and Number:
WIPO Patent Application WO/2014/103793
Kind Code:
A1
Abstract:
Provided are a spectrometer and a microspectroscopy system having a spectrometer capable of always acquiring, with a light receiving unit, a signal light in a light receiving area with superior sensitivity even when the wavelength resolution and acquired wavelength band change. The spectrometer (40), which is used in a microspectroscopy system (1), comprises a dispersing element (42) that disperses the signal light, a light collecting optical system (43) that collects the spectrum light dispersed by the dispersing element (42), and a light receiving unit (46) that receives the spectrum light. The light receiving unit (46) has a plurality of regions that have wavelength properties with mutually differing sensitivities for detecting spectrum light.
Inventors:
SATAKA RYOICHI (JP)
OSAWA HISAO (JP)
OSAWA HISAO (JP)
Application Number:
PCT/JP2013/083726
Publication Date:
July 03, 2014
Filing Date:
December 17, 2013
Export Citation:
Assignee:
NIKON CORP (JP)
International Classes:
G01J3/36; G01N21/64; G02B21/00; G01J3/433
Foreign References:
| JP2007218794A | 2007-08-30 | |||
| JP2007093414A | 2007-04-12 | |||
| JP2000199855A | 2000-07-18 | |||
| JP2001141565A | 2001-05-25 |
Attorney, Agent or Firm:
Hosaka Joyo (JP)
Hosaka 丈世 (JP)
Hosaka 丈世 (JP)
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