Title:
SPECTROSCOPIC SENSOR
Document Type and Number:
WIPO Patent Application WO/2013/051374
Kind Code:
A1
Abstract:
A spectroscopic sensor (1) has a cavity layer (21) and first and second mirror layers (22, 23) facing each other via the cavity layer (21), and comprises: an interference filter section (20) that selectively transmits light within a prescribed wavelength range, in accordance with the incident position; a light transmission substrate (3) arranged on the first mirror layer (22) side and which transmits light incident to the interference filter section (20); a light detection substrate (4) arranged on the second mirror layer (23) side and which detects light that has passed through the interference filter section (20); and a first coupling layer (11) arranged between the interference filter section (20) and the light transmission substrate (3). The cavity layer (21) and the first coupling layer (11) are silicon oxide film.
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Inventors:
SHIBAYAMA KATSUMI (JP)
KASAHARA TAKASHI (JP)
KASAHARA TAKASHI (JP)
Application Number:
PCT/JP2012/073082
Publication Date:
April 11, 2013
Filing Date:
September 10, 2012
Export Citation:
Assignee:
HAMAMATSU PHOTONICS KK (JP)
SHIBAYAMA KATSUMI (JP)
KASAHARA TAKASHI (JP)
SHIBAYAMA KATSUMI (JP)
KASAHARA TAKASHI (JP)
International Classes:
G01J3/26; G01J3/36
Domestic Patent References:
| WO2010087088A1 | 2010-08-05 |
Foreign References:
| JPH05322653A | 1993-12-07 | |||
| JPS58195127A | 1983-11-14 | |||
| JP2009085714A | 2009-04-23 | |||
| JP2005106753A | 2005-04-21 | |||
| JPS6457134A | 1989-03-03 | |||
| JPS62267623A | 1987-11-20 | |||
| JPS6435325A | 1989-02-06 | |||
| JP2006058301A | 2006-03-02 |
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
Yoshiki Hasegawa (JP)
Yoshiki Hasegawa (JP)
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Claims:
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