Title:
SPIN APPARATUS FOR SEMICONDUCTOR FRONT-END PROCESS, MEDICAL EQUIPMENT, AND PHYSICAL AND CHEMICAL APPLIANCES
Document Type and Number:
WIPO Patent Application WO/2017/099551
Kind Code:
A1
Abstract:
A spin apparatus comprises: a mounting unit having an upper surface on which a wafer is mounted; a control unit for generating a control signal for driving a motor; a motor for rotating, on the basis of the control signal, the mounting unit on which the wafer is mounted; and a display unit for displaying sectional driving data of the motor and real-time driving information of the motor, wherein the sectional driving data may be data for setting the number of rotations of the motor to be driven in at least one section, and the real-time driving information may be information which is displayed in conjunction with the sectional driving data as the motor is driven.
Inventors:
LEE HYUN JAE (KR)
Application Number:
PCT/KR2016/014536
Publication Date:
June 15, 2017
Filing Date:
December 12, 2016
Export Citation:
Assignee:
LEE HYUN JAE (KR)
International Classes:
H01L21/02; B05C11/08; H01L21/67; H01L21/683
Foreign References:
| KR100936100B1 | 2010-01-11 | |||
| KR20070037907A | 2007-04-09 | |||
| KR20150094416A | 2015-08-19 | |||
| KR20060026549A | 2006-03-24 | |||
| JP2005175329A | 2005-06-30 |
Attorney, Agent or Firm:
MAPS INTELLECTUAL PROPERTY LAW FIRM (KR)
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