SPIN COATER AND SPIN COAT METHOD - HITACHI HIGH-TECHNOLOGIES CORPORATION

Title:

SPIN COATER AND SPIN COAT METHOD

Document Type and Number:

WIPO Patent Application WO/2011/096329

Kind Code:

A1

Abstract:

Disclosed are a spin coater and a spin coat method, wherein a resist is uniformly applied on the surface of a disc-like substrate having a hole at the center, and the film-forming material is jetted from a nozzle, while rotating the disc-like substrate having the through hole at the center, and the film-forming material is applied on the upper surface of the substrate. In the jetting initial stage wherein the jetting quantity fluctuates, the film-forming material is jetted by disposing the inner diameter center of the nozzle on a position (initial jetting radius position) which is outside, in the radius direction, of the position to be the coat boundary on the disc, then, in the stage where the jetting quantity is stabilized, the inner diameter center of the nozzle is disposed in the vicinity of the coat boundary (stabilized jetting radius position) by moving the inner diameter center thereto from the initial jetting radius position, and the film-forming material is jetted more.

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Inventors:

YAMASHITA Naoaki (HITACHI HIGH-TECHNOLOGIES CORPORATION 1600 Kami, Kamisato-machi, Kodama-gu, Saitama 95, 〒3690395, JP)
山下　尚晃 (〒95 埼玉県児玉郡上里町嘉美１６００番地　株式会社日立ハイテクノロジーズ　埼玉事業所内 Saitama, 〒3690395, JP)
MORI Kyoichi (HITACHI HIGH-TECHNOLOGIES CORPORATION 1600 Kami, Kamisato-machi, Kodama-gu, Saitama 95, 〒3690395, JP)
森　恭一 (〒95 埼玉県児玉郡上里町嘉美１６００番地　株式会社日立ハイテクノロジーズ　埼玉事業所内 Saitama, 〒3690395, JP)
ISHIGURO Takayuki (HITACHI HIGH-TECHNOLOGIES CORPORATION 1600 Kami, Kamisato-machi, Kodama-gu, Saitama 95, 〒3690395, JP)
石黒　隆之 (〒95 埼玉県児玉郡上里町嘉美１６００番地　株式会社日立ハイテクノロジーズ　埼玉事業所内 Saitama, 〒3690395, JP)

Application Number:

JP2011/051635

Publication Date:

August 11, 2011

Filing Date:

January 27, 2011

Export Citation:

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Assignee:

HITACHI HIGH-TECHNOLOGIES CORPORATION (24-14, Nishi-Shimbashi 1-chome Minato-k, Tokyo 17, 〒1058717, JP)
株式会社日立ハイテクノロジーズ (〒17 東京都港区西新橋一丁目２４番１４号 Tokyo, 〒1058717, JP)
YAMASHITA Naoaki (HITACHI HIGH-TECHNOLOGIES CORPORATION 1600 Kami, Kamisato-machi, Kodama-gu, Saitama 95, 〒3690395, JP)
山下　尚晃 (〒95 埼玉県児玉郡上里町嘉美１６００番地　株式会社日立ハイテクノロジーズ　埼玉事業所内 Saitama, 〒3690395, JP)
MORI Kyoichi (HITACHI HIGH-TECHNOLOGIES CORPORATION 1600 Kami, Kamisato-machi, Kodama-gu, Saitama 95, 〒3690395, JP)
森　恭一 (〒95 埼玉県児玉郡上里町嘉美１６００番地　株式会社日立ハイテクノロジーズ　埼玉事業所内 Saitama, 〒3690395, JP)
ISHIGURO Takayuki (HITACHI HIGH-TECHNOLOGIES CORPORATION 1600 Kami, Kamisato-machi, Kodama-gu, Saitama 95, 〒3690395, JP)

International Classes:

B05D1/40; B05C11/08

Attorney, Agent or Firm:

POLAIRE I.P.C. (7-1 Hatchobori 2-chome, Chuo-ku Tokyo, 32, 〒1040032, JP)

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