Title:
SPIN-POLARIZED SCANNING ELECTRON MICROSCOPE
Document Type and Number:
WIPO Patent Application WO/2023/007687
Kind Code:
A1
Abstract:
In order to provide a spin-polarized scanning electron microscope with which it is possible to improve the SNR of a signal to be detected, this spin-polarized scanning electron microscope is characterized by comprising: a spin-polarized electron source that irradiates a sample with a spin-polarized electron beam the spin of which is deflected in a specific direction; a scanning unit that deflects the spin-polarized electron beam and scans the sample; a spin detector that detects the direction of spin of an emitted electron, which is an electron emitted from the sample scanned with the spin-polarized electron beam; and a control unit that, on the basis of the direction of spin of the spin-polarized electron beam, controls the direction of spin to be detected by the spin detector.
Inventors:
KOHASHI TERUO (JP)
MORISHITA HIDEO (JP)
OHSHIMA TAKASHI (JP)
KUWAHARA MAKOTO (JP)
MORISHITA HIDEO (JP)
OHSHIMA TAKASHI (JP)
KUWAHARA MAKOTO (JP)
Application Number:
PCT/JP2021/028244
Publication Date:
February 02, 2023
Filing Date:
July 30, 2021
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
NATIONAL UNIV CORPORATION TOKAI NATIONAL HIGHER EDUCATION AND RESEARCH SYSTEM (JP)
NATIONAL UNIV CORPORATION TOKAI NATIONAL HIGHER EDUCATION AND RESEARCH SYSTEM (JP)
International Classes:
H01J37/28
Domestic Patent References:
| WO2016207961A1 | 2016-12-29 |
Foreign References:
| JP2008251525A | 2008-10-16 | |||
| JP2017004774A | 2017-01-05 | |||
| JP2010003450A | 2010-01-07 | |||
| JP2008218063A | 2008-09-18 | |||
| US20200402762A1 | 2020-12-24 | |||
| US20210074509A1 | 2021-03-11 |
Attorney, Agent or Firm:
POLAIRE I.P.C. (JP)
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