Title:
SPRAY COATING, SPRAYING POWDER, SPRAYING POWDER MANUFACTURING METHOD AND SPRAY COATING MANUFACTURING METHOD
Document Type and Number:
WIPO Patent Application WO/2018/159713
Kind Code:
A1
Abstract:
Provided is a spray coating containing a rare earth fluoride and/or a rare earth acid fluoride, wherein carbon is contained therein at 0.01-2% by mass or titanium or molybdenum is contained therein at 1-1000 ppm, and wherein, in the case in which an acid fluoride is not contained therein, the spray coating is gray to black in which, in terms of the L*a*b* chromaticity, L* is 25-64, a* is -3.0 to +5.0, and b* is -4.0 to +8.0, and, in the case in which an acid fluoride is contained therein, the spray coating is white or gray to black in which, in terms of the L*a*b* chromaticity, L* is equal to or greater than 25 and less than 91, a* is -3.0 to +5.0, and b* is -6.0 to +8.0. By forming this coating on a plasma resistant member, a partial color change is reduced, the situation in which said member is washed in a manner that causes partial deterioration thereof when being removed and washed is eliminated, and thus, a member that is capable of reliably realizing the original longevity thereof is obtained.
Inventors:
HAMAYA NORIAKI (JP)
UEHARA ICHIRO (JP)
UEHARA ICHIRO (JP)
Application Number:
PCT/JP2018/007624
Publication Date:
September 07, 2018
Filing Date:
February 28, 2018
Export Citation:
Assignee:
SHINETSU CHEMICAL CO (JP)
International Classes:
C23C4/04; C01F17/259; C01F17/265; H01L21/302
Foreign References:
| JP2016138309A | 2016-08-04 | |||
| JP2017031457A | 2017-02-09 |
Attorney, Agent or Firm:
PATENT PROFESSIONAL CORPORATION EI-MEI PATENT OFFICE (JP)
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