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Title:
SPRAYING MODULE AND WET ETCHING APPARATUS HAVING SAME
Document Type and Number:
WIPO Patent Application WO/2017/000320
Kind Code:
A1
Abstract:
A spraying module (1), comprising a spraying tube (10); plural first through-holes (11) provided at a base portion of the spraying tube; and a nozzle mechanism (12) provided in each first through-hole, wherein, the nozzle mechanism comprises a sliding block (121) having an area greater than that of the first through-hole, and the sliding block is provided within the spraying tube and covers the first through-hole. A nozzle (122) is connected on the sliding block and extends from the first through-hole. The nozzle mechanism further comprises a locking holding member (123) connecting the sliding block to the spraying tube. When the locking holding member is loosened, the sliding block can move in a horizontal plane, thereby adjusting the position of the nozzle in the first through-hole. Further provided is a wet etching apparatus, comprising a spraying unit (400) having a plurality of the above spraying modules (1), the plural spraying tubes in the spraying modules being arranged so as to be mutually parallel or near-mutually parallel. In the spraying module and the wet etching apparatus having the spraying module, the nozzles and spraying tubes of the spraying module are detachably connected to each other, such that when a local etching non-uniformity occurs in an etching process, it is possible adjust a nozzle connection position and improve spraying evenness, thereby improving production efficiency and decreasing costs.

Inventors:
LI, Jia (No.9-2, Tangming Road Guangmin, Shenzhen Guangdong 2, 518132, CN)
Application Number:
CN2015/083503
Publication Date:
January 05, 2017
Filing Date:
July 08, 2015
Export Citation:
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Assignee:
SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO.,LTD. (No.9-2, Tangming Road Guangmin, Shenzhen Guangdong 2, 518132, CN)
International Classes:
B05B13/02
Foreign References:
CN1984720A2007-06-20
CN1613036A2005-05-04
CN1358406A2002-07-10
CN2153411Y1994-01-19
KR20110051419A2011-05-18
JP2012066177A2012-04-05
Attorney, Agent or Firm:
MING & YUE INTELLECTUAL PROPERTY LAW FIRM (Suite 611, 6/F Block 206, Nanyou Second Industrial Zone, No.21 Dengliang Road, Nansha, Shenzhen Guangdong 4, 518054, CN)
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