Title:
SPUTTERING DEVICE, DEPOSITION METHOD AND CONTROL DEVICE
Document Type and Number:
WIPO Patent Application WO/2011/162036
Kind Code:
A1
Abstract:
Provided is a sputtering device that, as well as providing a function that forms an even thickness laminated film on a flat substrate surface, is able to evenly form, even on a substrate formed by an uneven structure, a layer that attaches to the sides or wall surfaces of the uneven structure. The sputtering device set forth in one embodiment of the invention is provided with a substrate holder (22) that rotatably holds a substrate (21), a cathode unit (40) that is arranged in a position diagonally opposite the substrate holder (22), a position sensor (23) that detects the rotation position of the substrate held on the substrate holder, and a holder rotation control unit (51) for adjusting the rotation angle of the substrate according to the detected rotation position. The holder rotation control unit (51) controls rotation speed in such a manner that the substrate rotation speed when the cathode unit (40) is positioned facing a first direction, which is the long direction of the processing face of the uneven structure, is slower than the substrate rotation speed when the cathode unit (40) is positioned facing a second direction, which is perpendicular to the first direction in the direction of substrate rotation.
Inventors:
TSUNEKAWA Koji (2-5-1Kurigi, Asao-ku, Kawasaki-sh, Kanagawa 50, 〒2158550, JP)
恒川 孝二 (〒50 神奈川県川崎市麻生区栗木２－５－１ キヤノンアネルバ株式会社内 Kanagawa, 〒2158550, JP)
SUENAGA Masahiro (2-5-1Kurigi, Asao-ku, Kawasaki-sh, Kanagawa 50, 〒2158550, JP)
恒川 孝二 (〒50 神奈川県川崎市麻生区栗木２－５－１ キヤノンアネルバ株式会社内 Kanagawa, 〒2158550, JP)
SUENAGA Masahiro (2-5-1Kurigi, Asao-ku, Kawasaki-sh, Kanagawa 50, 〒2158550, JP)
Application Number:
JP2011/060924
Publication Date:
December 29, 2011
Filing Date:
May 12, 2011
Export Citation:
Assignee:
CANON ANELVA CORPORATION (2-5-1, Kurigi Asao-ku, Kawasaki-sh, Kanagawa 50, 〒2158550, JP)
キヤノンアネルバ株式会社 (〒50 神奈川県川崎市麻生区栗木２－５－１ Kanagawa, 〒2158550, JP)
TSUNEKAWA Koji (2-5-1Kurigi, Asao-ku, Kawasaki-sh, Kanagawa 50, 〒2158550, JP)
恒川 孝二 (〒50 神奈川県川崎市麻生区栗木２－５－１ キヤノンアネルバ株式会社内 Kanagawa, 〒2158550, JP)
キヤノンアネルバ株式会社 (〒50 神奈川県川崎市麻生区栗木２－５－１ Kanagawa, 〒2158550, JP)
TSUNEKAWA Koji (2-5-1Kurigi, Asao-ku, Kawasaki-sh, Kanagawa 50, 〒2158550, JP)
恒川 孝二 (〒50 神奈川県川崎市麻生区栗木２－５－１ キヤノンアネルバ株式会社内 Kanagawa, 〒2158550, JP)
International Classes:
C23C14/34; G11B5/39
Attorney, Agent or Firm:
OKABE Yuzuru et al. (No.602, Fuji Bldg. 2-3, Marunouchi 3-chome, Chiyoda-k, Tokyo 05, 〒1000005, JP)
Download PDF:
Claims:
Previous Patent: FUEL CELL
Next Patent: STEREOSCOPIC IMAGE PLAYBACK DEVICE, STEREOSCOPIC IMAGE PLAYBACK SYSTEM, AND STEREOSCOPIC IMAGE PLAYB...
Next Patent: STEREOSCOPIC IMAGE PLAYBACK DEVICE, STEREOSCOPIC IMAGE PLAYBACK SYSTEM, AND STEREOSCOPIC IMAGE PLAYB...