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Title:
SPUTTERING METHOD
Document Type and Number:
WIPO Patent Application WO/2019/205695
Kind Code:
A1
Abstract:
A sputtering method, comprising at least one sputtering process. The method comprises: a first pre-sputtering stage, enabling a target material to sputter on a baffle, which is used for shielding a substrate; a second pre-sputtering stage, enabling the compound of the target material to sputter on the baffle; a main sputtering stage, enabling the compound of the target material to sputter on the substrate, wherein the first pre-sputtering stage is used for regulating a sputtering voltage value in the main sputtering stage.

Inventors:
GUO, Bingliang (No. 8 Wenchang Avenue Beijing Economic-Technological Development Area, Beijing 6, 100176, CN)
MA, Huaichao (No. 8 Wenchang Avenue Beijing Economic-Technological Development Area, Beijing 6, 100176, CN)
SUN, Andong (No. 8 Wenchang Avenue Beijing Economic-Technological Development Area, Beijing 6, 100176, CN)
ZHANG, Henan (No. 8 Wenchang Avenue Beijing Economic-Technological Development Area, Beijing 6, 100176, CN)
DONG, Boyu (No. 8 Wenchang Avenue Beijing Economic-Technological Development Area, Beijing 6, 100176, CN)
ZHANG, Lu (No. 8 Wenchang Avenue Beijing Economic-Technological Development Area, Beijing 6, 100176, CN)
CHEN, Yujing (No. 8 Wenchang Avenue Beijing Economic-Technological Development Area, Beijing 6, 100176, CN)
Application Number:
CN2018/123821
Publication Date:
October 31, 2019
Filing Date:
December 26, 2018
Export Citation:
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Assignee:
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD. (No. 8 Wenchang Avenue Beijing Economic-Technological Development Area, Beijing 6, 100176, CN)
International Classes:
C23C14/06; C23C14/34
Foreign References:
CN107488828A2017-12-19
JPH04160144A1992-06-03
JPH02115361A1990-04-27
US5357389A1994-10-18
JPH09227860A1997-09-02
Attorney, Agent or Firm:
TEE & HOWE INTELLECTUAL PROPERTY ATTORNEYS (Tianshu ZHANG, 10th Floor Tower D, Minsheng Financial Center, 28 Jianguomennei Avenue, Dongcheng District, Beijing 5, 100005, CN)
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