Title:
SPUTTERING TARGET AND POWDER FOR PRODUCTION THEREOF
Document Type and Number:
WIPO Patent Application WO/2004/044260
Kind Code:
A1
Abstract:
An Sb-Te base sputtering target of 20 μm or less average crystal grain diameter, 60 MPa or greater deflective strength and 1000 ppm or less oxygen content. In particular, an Sb-Te base sputtering target that at the time of sputtering, enables effectively inhibiting particle occurrence, abnormal electrical discharge, nodule occurrence, target cracking or breakage, etc. and enables reducing the amount of oxygen contained in the target; a process for producing the same; and powder for sintering which is suitable for production of the sputtering target.
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Inventors:
Takahashi, Hideyuki c/o Isohara, Factory Of Nikko (Materials Co. Ltd., 187-4, Usuba, Hanakawa-ch, Kitaibaraki-shi Ibaraki, 319-1535, JP)
Yahagi, Masataka c/o Isohara, Factory Of Nikko (Materials Co. Ltd., 187-4, Usuba, Hanakawa-ch, Kitaibaraki-shi Ibaraki, 319-1535, JP)
Nakamura, Atsushi c/o Isohara, Factory Of Nikko (Materials Co. Ltd., 187-4, Usuba, Hanakawa-ch, Kitaibaraki-shi Ibaraki, 319-1535, JP)
Yahagi, Masataka c/o Isohara, Factory Of Nikko (Materials Co. Ltd., 187-4, Usuba, Hanakawa-ch, Kitaibaraki-shi Ibaraki, 319-1535, JP)
Nakamura, Atsushi c/o Isohara, Factory Of Nikko (Materials Co. Ltd., 187-4, Usuba, Hanakawa-ch, Kitaibaraki-shi Ibaraki, 319-1535, JP)
Application Number:
PCT/JP2003/009857
Publication Date:
May 27, 2004
Filing Date:
August 04, 2003
Export Citation:
Assignee:
NIKKO MATERIALS CO., LTD. (10-1, Toranomon 2-chome Minato-ku, Tokyo, 105-8407, JP)
Takahashi, Hideyuki c/o Isohara, Factory Of Nikko (Materials Co. Ltd., 187-4, Usuba, Hanakawa-ch, Kitaibaraki-shi Ibaraki, 319-1535, JP)
Yahagi, Masataka c/o Isohara, Factory Of Nikko (Materials Co. Ltd., 187-4, Usuba, Hanakawa-ch, Kitaibaraki-shi Ibaraki, 319-1535, JP)
Nakamura, Atsushi c/o Isohara, Factory Of Nikko (Materials Co. Ltd., 187-4, Usuba, Hanakawa-ch, Kitaibaraki-shi Ibaraki, 319-1535, JP)
Takahashi, Hideyuki c/o Isohara, Factory Of Nikko (Materials Co. Ltd., 187-4, Usuba, Hanakawa-ch, Kitaibaraki-shi Ibaraki, 319-1535, JP)
Yahagi, Masataka c/o Isohara, Factory Of Nikko (Materials Co. Ltd., 187-4, Usuba, Hanakawa-ch, Kitaibaraki-shi Ibaraki, 319-1535, JP)
Nakamura, Atsushi c/o Isohara, Factory Of Nikko (Materials Co. Ltd., 187-4, Usuba, Hanakawa-ch, Kitaibaraki-shi Ibaraki, 319-1535, JP)
International Classes:
B22F1/00; C22C1/04; C22C12/00; C23C14/34; (IPC1-7): C23C14/34; B22F1/00
Attorney, Agent or Firm:
Ogoshi, Isamu (Ogoshi International Patent Office, Toranomon 9 Mori Bldg. 3F 2-2, Atago 1-chom, Minato-ku Tokyo, 105-0002, JP)
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