Title:
SPUTTERING TARGET AND PRODUCTION METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2014/129648
Kind Code:
A1
Abstract:
The present invention provides a sputtering target that exhibits excellent machining properties and that makes it possible to form a compound film comprising Cu and Ga as main components thereof. The sputtering target is characterized by comprising, with respect to all of the metal elements in the sputtering target, 15.0-50.0 atom percent of Ga, a total of 0.1-10.0 atom percent of one or more metal elements selected from among Al, Zn, Sn, Ag, and Mg, and a remainder of Cu and unavoidable impurities.
Inventors:
ZHANG SHOUBIN (JP)
UMEMOTO KEITA (JP)
UMEMOTO KEITA (JP)
Application Number:
JP2014/054468
Publication Date:
August 28, 2014
Filing Date:
February 25, 2014
Export Citation:
Assignee:
MITSUBISHI MATERIALS CORP (JP)
International Classes:
C23C14/34; B22F3/14; B22F3/15; C22C1/04; C22C9/00; C22F1/08; C22C28/00; C22F1/00; C22F1/16
Domestic Patent References:
| WO2011001974A1 | 2011-01-06 | |||
| WO2011013471A1 | 2011-02-03 | |||
| WO2011010529A1 | 2011-01-27 | |||
| WO2012005098A1 | 2012-01-12 |
Foreign References:
| JP2005533187A | 2005-11-04 | |||
| JP2011149039A | 2011-08-04 | |||
| JP2011214140A | 2011-10-27 | |||
| JP2012229454A | 2012-11-22 | |||
| JP2000073163A | 2000-03-07 | |||
| JP3249408B2 | 2002-01-21 | |||
| JP2009283569A | 2009-12-03 |
Other References:
A. ROMEO ET AL.: "Development of thin-film Cu (In,Ga)Se2 and CdTe solar cells", PROGRESS IN PHOTOVOLTAICS: RESEARCH AND APPLICATIONS, vol. 12, no. 2-3, March 2004 (2004-03-01), pages 93 - 111, XP055024654
See also references of EP 2960355A4
A. ROMEO: "Development of Thin-film Cu(ln,Ga)Se and CdTe Solar Cells", PROG. PHOTOVOLT: RES. APPL., vol. 12, 2004, pages 93 - 111, XP055024654, DOI: doi:10.1002/pip.527
See also references of EP 2960355A4
A. ROMEO: "Development of Thin-film Cu(ln,Ga)Se and CdTe Solar Cells", PROG. PHOTOVOLT: RES. APPL., vol. 12, 2004, pages 93 - 111, XP055024654, DOI: doi:10.1002/pip.527
Attorney, Agent or Firm:
SHIGA Masatake et al. (JP)
Masatake Shiga (JP)
Masatake Shiga (JP)
Download PDF: