Title:
STABLE GLOW DISCHARGE DETECTOR
Document Type and Number:
WIPO Patent Application WO2003042676
Kind Code:
A3
Abstract:
A highly sensitive electronic ion cell for the measurement of trace elements in He carrier gas which involves glow discharge. A constant wave (CW) stable glow discharge detector which is controlled through a biased resistor, can detect the change of electron density caused by impurities in the He carrier gas by many orders of magnitude larger than that caused by direct ionization or electron capture. The stable glow discharge detector utilizes a floating pseudo-electrode to form a probe in or near the plasma and a solid rod electrode. By using this probe, the large variation of electron density due to trace amounts of impurities can be directly measured. The solid rod electrode provides greater stability and thus easier alignment.
Inventors:
KOO JACKSON C
YU CONRAD M
YU CONRAD M
Application Number:
PCT/US2002/035004
Publication Date:
November 06, 2003
Filing Date:
October 30, 2002
Export Citation:
Assignee:
UNIV CALIFORNIA (US)
International Classes:
G01N27/70; G01N30/64; (IPC1-7): G01N30/64; G01N27/70
Domestic Patent References:
| WO2001044800A2 | 2001-06-21 |
Foreign References:
| US5591896A | 1997-01-07 | |||
| US5955886A | 1999-09-21 | |||
| US3042833A | 1962-07-03 |
Download PDF: