Title:
STACKED THIN FILM TEMPERATURE SENSOR ARRAY
Document Type and Number:
WIPO Patent Application WO/2022/108060
Kind Code:
A1
Abstract:
The present invention relates to a thin-film type temperature measurement array, and to a thin film RTD array that is manufactured by a MEMS technique and is installed in a phantom used in a non-invasive treatment plan using heat and can measure temperature. In detail, the present invention relates to an apparatus and method capable of measuring real-time change in a temperature distribution at a plurality of points while minimizing the influence on ultrasonic waves and temperature distribution in the phantom, capable of measuring the resistance even when a resistance wire is partially disconnected during a manufacturing process, capable of measuring the temperature distribution in a 3D space through stacking, and capable of electrical insulation within a simulated material of human tissue containing water through a waterproof process, by using the thin-film type temperature measurement array including one current source and one voltage measurement (DAQ channel) means for each RTD.
More Like This:
Inventors:
DOH IL (KR)
KIM YONG-TAE (KR)
KIM YONG-TAE (KR)
Application Number:
PCT/KR2021/011559
Publication Date:
May 27, 2022
Filing Date:
August 27, 2021
Export Citation:
Assignee:
KOREA RES INSTITUTE OF STANDARD AND SCIENCE (KR)
International Classes:
G01K7/16; A61N7/02; G01K13/00
Foreign References:
| KR20180097191A | 2018-08-31 | |||
| JP2001008902A | 2001-01-16 | |||
| KR20170057535A | 2017-05-25 | |||
| KR102280666B1 | 2021-07-23 |
Other References:
JAI KYOUNG SIM; JAEYUB HYUN; IL DOH; BONGYOUNG AHN; YONG TAE KIM: "Thin-film resistance temperature detector array for the measurement of temperature distribution inside a phantom", METROLOGIA, INSTITUTE OF PHYSICS PUBLISHING, BRISTOL, GB, vol. 55, no. 1, 1 February 2018 (2018-02-01), GB , pages L5 - L11, XP020323685, ISSN: 0026-1394, DOI: 10.1088/1681-7575/aa90bd
Attorney, Agent or Firm:
IPUS PATENT & LAW FIRM (KR)
Download PDF: