Title:
STAGE APPARATUS, EXPOSURE APPARATUS, INSPECTION APPARATUS, AND DEVICE MANUFACTURING METHOD
Document Type and Number:
WIPO Patent Application WO/2022/211023
Kind Code:
A1
Abstract:
This stage apparatus (100) comprises: a first slider (14); a first guide (12) which guides movement of the first slider (14) in a first direction; a second slider (18) which includes two slider parts (32, 34) separated from each other in the first direction and supporting the first guide (12) from below; and a second guide (16) which guides movement of the second slider (18).
Inventors:
YOSHIDA TATSUYA (JP)
Application Number:
PCT/JP2022/016511
Publication Date:
October 06, 2022
Filing Date:
March 31, 2022
Export Citation:
Assignee:
SUMITOMO HEAVY INDUSTRIES (JP)
International Classes:
F16C29/00; F16C32/00; G03F7/20; H01L21/68
Domestic Patent References:
| WO2020044685A1 | 2020-03-05 |
Foreign References:
| JP2005050944A | 2005-02-24 | |||
| JP2018170412A | 2018-11-01 | |||
| JP2018062993A | 2018-04-19 | |||
| JP2005203567A | 2005-07-28 | |||
| JP2005079367A | 2005-03-24 | |||
| JPH0557558A | 1993-03-09 |
Attorney, Agent or Firm:
MORISHITA Sakaki (JP)
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