STAGE APPARATUS, EXPOSURE APPARATUS, AND EXPOSURE METHOD

Title:

STAGE APPARATUS, EXPOSURE APPARATUS, AND EXPOSURE METHOD

Document Type and Number:

WIPO Patent Application WO/2005/122242

Kind Code:

A1

Abstract:

A utility supply apparatus (155) for supplying utilities to a stage moving on a movement surface has a first shaft section (232), first support sections (234, 235), a second shaft section (238), and a second support section (239). The first shaft section is supported by the first support section so as to be movable in the direction of a first axis and about the first axis. Further, the second shaft section is supported by the second support section so as to be movable in the direction of a second axis and about the second axis. This way the utility supply apparatus is made as a mechanism having at least four degrees of freedom. As a result, even if the stage moves, in a two-dimensional surface, in the first and the second axis direction and in the rotation direction of each axis, the utility supply apparatus does not interfere with the movement of the table. As a consequence, reduction in controllability of a stage position caused by drag of a tube can be perfectly avoided, which can not be achieved by a case where piping such as a tube is used for the supply of fluid.

Inventors:

SHIBAZAKI YUICHI (JP)

Application Number:

PCT/JP2005/010315

Publication Date:

December 22, 2005

Filing Date:

June 06, 2005

Export Citation:

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Assignee:

NIKON CORP (JP)
SHIBAZAKI YUICHI (JP)

International Classes:

G03F7/20; G12B5/00; H01L21/027; H01L21/68; (IPC1-7): H01L21/68; G03F7/20; G12B5/00; H01L21/027

Domestic Patent References:

WO1999049504A1

1999-09-30

Foreign References:

JP2002198284A	2002-07-12
JP3102327U	2004-07-02
JP2001007015A	2001-01-12
JP2001020951A	2001-01-23
US5623853A	1997-04-29
US6246204B1	2001-06-12
US5874820A	1999-02-23

Other References: