Title:
STAGE APPARATUS
Document Type and Number:
WIPO Patent Application WO/2012/014371
Kind Code:
A1
Abstract:
Provided is a stage apparatus, wherein fluctuation in speed is reduced when a stage with a sample mounted thereon is moved at low speed, so that an image to be observed can be moved at constant speed when conducting an observation under high-magnification using a scanning electron microscope. An amount to be controlled is obtained, with a compensating means (203), from the deviation between position information that is obtained by letting position information detected by a position detecting means (106) pass through a first low-pass filter (201), and a command value that is obtained by integrating a speed command value inputted from a stage manipulation inputting means and letting the integrated result pass through a second low-pass filter (202) having the same frequency characteristic as the first low-pass filter. A driving signal to be outputted to a driving means (104) by a waveform outputting means (204) is generated from the result of adding the amount to be controlled and the speed command value.
Inventors:
MOMOI, Yasuyuki (HITACHI LTD., 1-1, Omika-cho 7-chome, Hitachi-sh, Ibaraki 92, 〒3191292, JP)
桃井 康行 (〒92 茨城県日立市大みか町七丁目１番１号 株式会社 日立製作所 日立研究所内 Ibaraki, 〒3191292, JP)
TAKEUCHI, Koichiro (HITACHI HIGH-TECHNOLOGIES CORPORATION 882, Oaza Ichige, Hitachinaka-sh, Ibaraki 04, 〒3128504, JP)
竹内 恒一郎 (〒04 茨城県ひたちなか市大字市毛８８２番地 株式会社 日立ハイテクノロジーズ 那珂事業所内 Ibaraki, 〒3128504, JP)
桃井 康行 (〒92 茨城県日立市大みか町七丁目１番１号 株式会社 日立製作所 日立研究所内 Ibaraki, 〒3191292, JP)
TAKEUCHI, Koichiro (HITACHI HIGH-TECHNOLOGIES CORPORATION 882, Oaza Ichige, Hitachinaka-sh, Ibaraki 04, 〒3128504, JP)
竹内 恒一郎 (〒04 茨城県ひたちなか市大字市毛８８２番地 株式会社 日立ハイテクノロジーズ 那珂事業所内 Ibaraki, 〒3128504, JP)
Application Number:
JP2011/003396
Publication Date:
February 02, 2012
Filing Date:
June 15, 2011
Export Citation:
Assignee:
HITACHI HIGH-TECHNOLOGIES CORPORATION (24-14, Nishi Shimbashi 1-chome Minato-k, Tokyo 17, 〒1058717, JP)
株式会社 日立ハイテクノロジーズ (〒17 東京都港区西新橋一丁目２４番１４号 Tokyo, 〒1058717, JP)
MOMOI, Yasuyuki (HITACHI LTD., 1-1, Omika-cho 7-chome, Hitachi-sh, Ibaraki 92, 〒3191292, JP)
桃井 康行 (〒92 茨城県日立市大みか町七丁目１番１号 株式会社 日立製作所 日立研究所内 Ibaraki, 〒3191292, JP)
TAKEUCHI, Koichiro (HITACHI HIGH-TECHNOLOGIES CORPORATION 882, Oaza Ichige, Hitachinaka-sh, Ibaraki 04, 〒3128504, JP)
株式会社 日立ハイテクノロジーズ (〒17 東京都港区西新橋一丁目２４番１４号 Tokyo, 〒1058717, JP)
MOMOI, Yasuyuki (HITACHI LTD., 1-1, Omika-cho 7-chome, Hitachi-sh, Ibaraki 92, 〒3191292, JP)
桃井 康行 (〒92 茨城県日立市大みか町七丁目１番１号 株式会社 日立製作所 日立研究所内 Ibaraki, 〒3191292, JP)
TAKEUCHI, Koichiro (HITACHI HIGH-TECHNOLOGIES CORPORATION 882, Oaza Ichige, Hitachinaka-sh, Ibaraki 04, 〒3128504, JP)
International Classes:
H01J37/20
Attorney, Agent or Firm:
INOUE, Manabu et al. (6-1, Marunouchi 1-chome, Chiyoda-k, Tokyo 20, 〒1008220, JP)
Claims: